Movable Reflective Device for Fast Optical Inspection
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Solution Overview
Problem
Current lithographic systems face challenges in increasing fabrication speed and throughput, particularly in the optical inspection processes used in these systems.
Innovation Solution
The implementation of a system comprising optical devices, reflective devices, a movable reflective device, and a detector, which allows for the reception and processing of scattered radiation from targets in a manner that reduces relative motion between targets and optical devices, thereby enhancing inspection speed.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a single optical device is used to inspect multiple targets sequentially, then device complexity is reduced, but inspection time increases due to repeated relative movement between targets and optical devices
Solution Approach 1:
The system divides the optical inspection function into multiple optical devices (first optical device, second optical device, etc.) arranged in different spatial positions. Each optical device is responsible for inspecting specific targets simultaneously, eliminating the need for sequential inspection and repeated movement of a single optical device between targets.
Solution Approach 2:
The patent transitions from a single-point inspection approach to a multi-point parallel inspection by arranging multiple optical devices in different spatial dimensions around the target array. This dimensional expansion allows simultaneous inspection of multiple targets without increasing the complexity of individual optical device configurations.
2Productivity
If multiple optical devices are used to inspect multiple targets simultaneously, then inspection speed increases, but device complexity increases
Solution Approach 1:
Each optical device in the system is designed with universal functionality to inspect multiple different targets by receiving scattered radiation from various positions. The optical devices can be dynamically configured to inspect different targets based on the movable reflective device's positioning, reducing the need for specialized equipment for each target and thereby managing complexity.
Solution Approach 2:
The movable reflective device acts as an intermediary that directs scattered radiation from multiple targets to the appropriate optical devices. This intermediary component coordinates the interaction between multiple targets and multiple optical devices, enabling simultaneous inspection while managing system complexity through centralized beam control.
3Loss of time
If relative movement between targets and optical devices is minimized, then inspection time decreases, but the system requires more complex positioning mechanisms
Solution Approach 1:
The system employs dynamic positioning where the movable reflective device can rapidly adjust its position to direct scattered radiation from different targets to the appropriate optical devices. This dynamic configuration allows the system to minimize relative movement between stationary optical devices and targets during inspection, reducing inspection time while managing positioning complexity through controlled mobility of the reflective device.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration significantly reduces the time required for inspecting multiple targets by minimizing the relative movement between targets and optical devices, leading to increased fabrication speed and throughput in lithographic systems.
Implementation Method 1
optical devices disposed at a first plane and around an axis of the system and configured to receive scattered radiation from targets
Data Source
AI summary
A system includes optical devices, reflective devices, a movable reflective device, and a detector. The optical devices are disposed at a first plane and around a axis of the system and receive scattered radiation from targets. The reflective devices are disposed at at least a second plane and around the axis. Each of the reflective devices receives the scattered radiation from a corresponding one of the optical devices. The movable reflective device is disposed along the axis and receives the scattered radiation from each of the reflective devices. The detector receives the scattered radiation from the movable reflective device.