Movable Reflector Assembly for Uniform Substrate Heating
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Current reflectors in semiconductor processing chambers are limited in their ability to adjust energy directing capabilities, particularly when processing parameters are adjusted, leading to non-uniform heat distribution and temperature profiles on semiconductor substrates.
Innovation Solution
A movable radiation reflector assembly with a reflector disk and actuator system that allows axial displacement and angular adjustment, enabling flexible control of radiant energy distribution and temperature profile on the substrate, along with channels for cooling medium flow.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a fixed reflector is used in the deposition chamber, then the structure is simple and stable, but the energy directing ability cannot be adjusted when processing parameters change
Solution Approach 1:
The patent applies the dynamics principle by making the reflector movable instead of fixed. The reflector is coupled to a positioning mechanism that enables it to change position and orientation dynamically. This allows the reflector to adjust its energy directing ability in response to changing processing parameters, resolving the contradiction between adaptability and structural simplicity.
2Adaptability or versatility
If the reflector is made movable to adjust energy direction, then processing flexibility improves, but the device complexity increases
Solution Approach 1:
The patent applies the universality principle by designing a positioning mechanism that performs multiple functions: it positions the reflector, orients it correctly, and maintains stability during operation. This multi-functional approach reduces the need for separate components for each function, thereby limiting the increase in device complexity while achieving processing flexibility.
3Loss of energy
If the reflector disk is positioned close to the heat sources, then energy reflection efficiency is high, but cooling becomes difficult
Solution Approach 1:
The patent applies the intermediary principle by introducing a cooling medium flow path between the reflector disk and the heat sources. This cooling medium acts as an intermediary that carries heat away from the reflector, enabling it to maintain operational temperatures even when positioned close to the heat sources for efficient energy reflection.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The movable reflector assembly enhances temperature uniformity and deposition uniformity across the substrate by adjusting radiant energy direction and cooling, improving process control and efficiency.
Implementation Method 1
a reflector disk that includes a center hole, a bottom reflective surface, and a top surface
Implementation Method 2
A cooling medium can flow through a space between the movable radiation reflector and the cylindrical wall
Data Source
AI summary
The present disclosure relates to a radiation reflector assembly for use with a semiconductor processing chamber and a substrate processing system having the radiation reflector assembly. The radiation reflector assembly includes a shell body that includes an interior cylindrical wall; and a reflector disk that includes a center hole, a bottom reflective surface, and a top surface. The reflector disk is disposed within and spaced from the interior cylindrical wall in a manner that permits fluid to flow therebetween. The radiation reflector assembly includes an actuator coupled to the reflector disk, and the actuator is operable to axially displace the reflector disk relative to the shell body. The radiation reflector assembly includes an elongated tube extending through the center hole of the reflector disk. A method of processing a substrate with the radiation reflector assembly is also described.