Movable Contact Sensor Assembly Sealed Construction

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Solution Overview

Problem

Temperature sensors in processing chambers face challenges in maintaining contact with the object being measured, leading to inaccurate readings due to the sensor tip's inability to be visually verified for contact and potential loss of contact over time.

Innovation Solution

A sensor assembly comprising a tubular housing, a movable temperature sensor, a seal carrier, and a sealing member that maintains a hermetic seal while allowing the sensor to be extended and retracted, with a spring mechanism to ensure consistent contact with the object and a position indicator to verify contact status.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If the sensor tip is inserted into the processing chamber to contact the object, then temperature measurement is enabled, but it becomes impossible to visually verify contact status and maintain hermetic seal

Engineering Contradiction:

Improvetemperature measurement accuracyVSAvoidsensor tip contact verification

Core Design Contradiction:

Measurement precisionVSDifficulty of detecting and measuring

Solution Approach 1:

The patent applies a position indicator (visual marker) on the sensor assembly that changes position to indicate whether the sensor tip is in contact with the object. This allows visual verification of contact status without requiring direct observation of the sensor tip inside the chamber, resolving the contradiction between enabling measurement and allowing verification.

Inventive Principle:

Principle #32Color changes

2Measurement precision

If the sensor tip is inserted into the processing chamber, then temperature measurement is enabled, but hermetic seal of the chamber is compromised

Engineering Contradiction:

Improvetemperature measurement accuracyVSAvoidgas leakage

Core Design Contradiction:

Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

The patent employs a nested structure where the sensor assembly is housed within a sealed housing that contains internal seals. The sensor tip extends through the housing while the seals prevent gas leakage, allowing the sensor to be nested inside a protective sealed structure that maintains chamber hermeticity while enabling measurement.

Inventive Principle:

Principle #7Nested doll (Nesting)

Solution Approach 2:

The patent introduces seal members as intermediary elements between the sensor assembly and the processing chamber. These seals act as mediators that allow the sensor to penetrate the chamber wall while preventing gas leakage, resolving the contradiction between enabling measurement and maintaining hermetic seal.

Inventive Principle:

Principle #24Intermediary (Mediator)

3Ease of manufacture

If the sensor is fixed in position, then installation is simple, but contact reliability with the object deteriorates over time

Engineering Contradiction:

Improveinstallation simplicityVSAvoidcontact reliability

Core Design Contradiction:

Ease of manufactureVSReliability

Solution Approach 1:

The patent transforms the sensor from a fixed position to a movable position by incorporating a spring mechanism that allows the sensor to move axially. This dynamic configuration enables the sensor to automatically adjust and maintain contact with the object, improving reliability while keeping the installation process relatively simple.

Inventive Principle:

Principle #15Dynamics

Solution Approach 2:

The patent changes the positional parameter of the sensor from fixed to variable by introducing a spring mechanism. This allows the sensor position to change dynamically in response to object position changes, maintaining reliable contact over time while preserving ease of installation.

Inventive Principle:

Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Ensures accurate and consistent temperature measurement by maintaining good contact with the object and preventing gas leakage, even after extended periods of operation.

Implementation Method 1

The sealing member is in sliding contact with the inner surface of the tubular housing and hermetically seals an interface between the sealing member and the inner surface of the tubular housing

Methodology Applied

Scientific EffectHermetic sealing:

Implementation Method 2

with a spring mechanism to ensure consistent contact with the object

Methodology Applied

Scientific EffectSpring force: Spring

Data Source

PatentUS9885615B2Movable contact sensor assembly having sealed construction

Publication Date: 2018.02.06 WATLOW ELECTRIC MANUFACTURING CO

AI summary

A sensor assembly includes a tubular housing having an inner surface defining an axial chamber and a temperature sensor disposed in the axial chamber and moveable along an axial direction of the tubular housing. The sensor assembly further includes a seal carrier movable with the temperature sensor, and a sealing member disposed around the seal carrier. The sealing member is in sliding contact with the inner surface of the tubular housing and hermetically seals an interface between the sealing member and the inner surface of the tubular housing.