Movable Shelf for FOUP Storage in Substrate Processing Apparatus
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Solution Overview
Problem
Existing semiconductor manufacturing apparatuses face challenges in modifying their configuration to accommodate changes in the number of substrates to be processed without increasing footprint or requiring extensive reassembly and adjustment, especially when increasing the number of substrates beyond standard capacities.
Innovation Solution
The apparatus incorporates a transport mechanism with an elevating support and a controller that allows for the placement and movement of substrate containers between different regions, enabling efficient delivery and storage without needing to modify the existing transport device's operation or footprint, by using movable shelves that can be easily added or removed.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If the number of stored FOUPs is increased by disposing FOUPs above the apparatus, then the storage capacity is improved, but the apparatus height increases which may exceed transportation limitations
Solution Approach 1:
The shelf is designed to be movable rather than fixed, allowing it to extend into the movable region of the support when needed and retract when not needed. This dynamic configuration enables the apparatus to adapt its height profile, maintaining low height for transportation while providing increased storage capacity during operation.
Solution Approach 2:
Instead of increasing storage capacity purely in the vertical dimension (which increases apparatus height), the invention utilizes the horizontal movable region of the support. The shelf extends into this horizontal space, effectively using three-dimensional space more efficiently without compromising transportation constraints.
2Productivity
If a buffer shelf is added to the upper part of the apparatus to increase substrate processing capacity, then the processing capacity is improved, but the device complexity and modification difficulty increase
Solution Approach 1:
The movable shelf serves multiple functions: it acts as a buffer shelf for increasing substrate processing capacity, provides additional FOUP storage, and can be repositioned or removed based on operational requirements. This multi-functionality reduces the need for separate dedicated components for each purpose.
Solution Approach 2:
The shelf's movability allows the apparatus to be reconfigured based on different operational scenarios. When increased processing capacity is needed, the shelf extends into the movable region; when standard capacity suffices, the shelf retracts. This dynamic adaptability simplifies modification compared to fixed additions.
3Productivity
If the apparatus is modified to accommodate more substrates, then the substrate processing capacity is improved, but the time and cost for reassembly and adjustment increase
Solution Approach 1:
The shelf is designed as a separable, modular component that can be independently added or removed from the apparatus. This segmentation allows for quick installation and removal without requiring disassembly of the entire apparatus, significantly reducing modification time and cost.
Solution Approach 2:
The movable shelf mechanism is designed to be easily actuated and repositioned, allowing operational staff to reconfigure the apparatus capacity without extensive technical intervention. This reduces both the time and expertise required for modifications.
Data Source
AI summary
A substrate processing apparatus includes a plurality of placement parts on which a substrate container is placed, a driving part configured to move the plurality of placement parts, a transport mechanism configured to load the substrate container into one of the plurality of placement parts and to unload the substrate container from one of the plurality of placement parts, and a controller configured to control the driving part and the transport mechanism so that by raising or lowering the transport mechanism while keeping a support of the transport mechanism unmoved in an initial position, the substrate container is delivered from one of the plurality of placement parts to the support of the transport mechanism, and the substrate container is delivered from the support of the transport mechanism to one of the plurality of placement parts.