Movable Shield Stop for High-Resolution X-Ray Inspection
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Solution Overview
Problem
Current X-ray inspection systems face challenges in achieving high-resolution object imaging, particularly for small structures, as they often expose unnecessary regions of objects to X-rays, leading to inefficient illumination and potential damage.
Innovation Solution
A detection system with a movable shield stop and object mount, synchronized by a control device, ensures precise X-ray illumination of only the regions being imaged, using an X-ray source and imaging optics to achieve high-resolution imaging of structures smaller than 1 μm, and allows for 3D tomographic reconstruction by combining 2D images from different directions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a stationary shield stop with fixed aperture is used, then the device complexity is reduced, but the imaging precision and resolution deteriorate because unnecessary regions are exposed to X-rays
Solution Approach 1:
The patent applies the dynamics principle by making the shield stop movable instead of stationary. The shield stop can be displaced along with the object mount to maintain proper alignment between the X-ray illumination region and the imaging optical arrangement's field of view. This dynamic adjustment ensures that only the regions currently being imaged are exposed to X-rays, thereby improving imaging precision without requiring complex additional components beyond the movable mount mechanism.
2Ease of operation
If the entire object is illuminated with X-rays, then the ease of operation is simplified, but the object-generated harmful factors increase due to unnecessary X-ray exposure
Solution Approach 1:
The patent applies the local quality principle by restricting X-ray illumination to only the specific region of the object that is currently within the field of view of the imaging optical arrangement. The shield stop with its aperture is positioned and sized to match the illumination requirements of the imaging system, ensuring that X-rays are delivered only where needed. This localized illumination approach reduces unnecessary X-ray exposure and associated harmful effects while maintaining operational simplicity through automated coordination.
3Productivity
If the shield stop aperture is larger than necessary, then the loss of time is reduced, but the manufacturing precision deteriorates due to inclusion of uninspected regions
Solution Approach 1:
The patent applies the dynamics principle by making the shield stop movable to dynamically adjust the illuminated region. As the object or imaging system moves, the shield stop moves correspondingly to maintain precise alignment between the aperture and the field of view. This ensures that the aperture size and position always match the current inspection requirements, maintaining high inspection precision without sacrificing productivity since the movement is coordinated and automated.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables high-resolution imaging of small structures like Cu-Cu hybrid bonding and direct bonds between microchips and substrates, minimizing unnecessary X-ray exposure and improving imaging quality through precise control of the X-ray path.
Implementation Method 1
an X-ray source for generating X-rays
Implementation Method 2
an imaging optics to image a transfer field in a field plane into a detection field in a detection plane
Implementation Method 3
a shield stop having a shield stop aperture transmissive for the X-rays used to image the object, the shield stop being arranged in an arrangement plane in a light path of the X-rays between the X-ray source and the object mount
Data Source
AI summary
A detection system serves for X-ray inspection of an object. An imaging optical arrangement serves to image the object in an object plane illuminated by X-rays generated by an X-ray source. The imaging optical arrangement comprises an imaging optics to image a transfer field in a field plane into a detection field in a detection plane. A detection array is arranged at the detection field. An object mount holds the object to be imaged and is movable relative to the X-ray source via an object displacement drive along at least one lateral object displacement direction in the object plane. A shield stop with a transmissive shield stop aperture is arranged in an arrangement plane in a light path and is movable via a shield stop displacement drive in the arrangement plane. A control device has a drive control unit, which is in signal connection with the shield stop displacement drive and with the object displacement drive for synchronizing a movement of the shield stop displacement drive and the object displacement drive. The result is an optimization of an X-ray illumination of the object to achieve a high-resolution object imaging.