Movable Shield Sandwiching Substrate for Particle Control
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Solution Overview
Problem
Existing processing apparatuses require multiple shields to prevent thin films from adhering to the inner walls of vacuum vessels, leading to complex maintenance and higher costs due to frequent replacements.
Innovation Solution
A processing apparatus with a vacuum vessel, supply sources for both surfaces of a substrate, and movable shield members that form process spaces between the supply sources and the substrate, allowing for efficient application of processes while minimizing shield usage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If many shields are combined and arranged in a vacuum vessel to prevent thin films from adhering to the inner wall, then the prevention of particle generation is improved, but the device complexity and maintenance cost increase
Solution Approach 1:
The patent combines multiple shields into a single integrated shield structure that performs the same particle prevention function. Instead of arranging many separate shields throughout the vacuum vessel, one shield is strategically positioned to block thin film adhesion to the inner wall, thereby reducing device complexity while maintaining particle generation prevention
Solution Approach 2:
The shield is designed to serve multiple functions: it prevents thin films from adhering to the inner wall of the vacuum vessel, blocks particle generation, and can be positioned to protect multiple areas. This multi-functional design replaces the need for numerous specialized shields with a single versatile component
2Reliability
If many shields are arranged in a vacuum vessel to suppress thin film adhesion, then the reliability of particle prevention is improved, but the ease of repair and maintenance worsen
Solution Approach 1:
By merging multiple shields into one integrated structure, the patent reduces the number of components that need to be monitored, removed, and replaced during maintenance. This single shield design maintains particle prevention reliability while significantly improving ease of repair compared to managing many separate shields
3Object-affected harmful factors
If replaceable shields are arranged to prevent thin film adhesion, then the protection against particle generation is improved, but the maintenance cost increases
Solution Approach 1:
The patent consolidates multiple replaceable shields into a single shield structure, directly reducing the quantity of components that require periodic replacement. This merger maintains the particle generation prevention function while proportionally reducing maintenance costs associated with purchasing and installing multiple shields
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution reduces the number of shields needed, simplifying maintenance, lowering maintenance costs, and maintaining a stable pressure distribution within the vacuum vessel by forming process spaces that prevent thin films from adhering to the inner walls.
Implementation Method 1
performs processes such as sputtering while sequentially conveying each substrate held on a substrate holder into a vacuum vessel
Implementation Method 2
thin films originating from a process adhere to the inner wall of the vacuum vessel and units and the like arranged inside the vacuum vessel
Data Source
AI summary
A processing apparatus includes a supply source including a first supply source and a second supply source arranged to respectively face a first surface of a substrate and a second surface on an opposite side of the first surface. The supply source is configured to supply a material to apply a process to the substrate. A shield member includes a first shield provided around the first supply source and a second shield provided around the second supply source, the first shield and the second shield being arranged to sandwich the substrate. A moving device is configured to move the first shield and the second shield to set one of a close state in which the first shield and the second shield are close to each other and a separate state in which the first shield and the second shield are separate from each other.