Movable Shutter Mask Module for OLED Deposition Monitoring
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Solution Overview
Problem
Existing substrate processing systems lack effective methods for individually monitoring and controlling the deposition of multiple material layers on substrates, particularly in in-line systems, which is crucial for ensuring uniformity and quality in OLED manufacturing.
Innovation Solution
A mask module and substrate carrier system with a movable shutter and actuator are introduced, allowing precise alignment of openings for depositing materials on test elements and device regions, enabling individual monitoring and control of layer deposition.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a fixed mask with multiple openings is used for depositing materials on different regions, then multiple test elements can be exposed simultaneously, but individual monitoring and control of each test element becomes difficult
Solution Approach 1:
The mask is divided into multiple independent movable shutters, each controlling a specific opening. This segmentation allows individual control of each test element while maintaining the ability to expose multiple elements simultaneously, resolving the contradiction between productivity and measurement precision.
Solution Approach 2:
The shutters are made movable rather than fixed, enabling dynamic control of which test elements are exposed. This allows the system to selectively monitor individual test elements with high precision while maintaining the capability to expose multiple elements simultaneously when needed.
2Measurement precision
If the substrate is removed from the vacuum chamber to change mask configurations, then individual test element monitoring can be achieved, but processing time increases
Solution Approach 1:
The movable shutters enable configuration changes without removing the substrate from the vacuum chamber. The shutters can be dynamically adjusted to expose or cover specific openings, allowing individual test element monitoring to be achieved while maintaining continuous vacuum processing and minimizing time loss.
Solution Approach 2:
The substrate remains in the vacuum chamber throughout the process, and the movable shutters allow continuous adjustment of exposure patterns without breaking the vacuum or removing the substrate. This maintains continuous useful action and minimizes processing time while enabling individual monitoring.
3Adaptability or versatility
If multiple fixed masks are used for different test regions, then comprehensive coverage is achieved, but device complexity increases
Solution Approach 1:
A single mask structure with multiple movable shutters replaces the need for multiple fixed masks. This universal mask can be configured to cover or expose any combination of test regions by adjusting the shutter positions, achieving comprehensive coverage while reducing the number of separate mask components needed.
Solution Approach 2:
The movable shutters provide dynamic reconfiguration capability within a single mask structure. Instead of requiring multiple fixed masks for different test regions, the system uses one adaptable mask that can be dynamically adjusted to monitor any test element individually or in combination, reducing overall device complexity.
Data Source
AI summary
A mask module configured to be coupled to a substrate carrier is described. The mask module includes a body; a mask coupled to the body, the mask having one or more first openings; a movable shutter, the movable shutter having one or more second openings; and an actuator coupled to the movable shutter. The actuator is configured to move the one or more second openings to align at least one opening of the one or more second openings over at least one opening of the one or more first openings.