Movable Stop Mechanism for Lithography Component Alignment
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Solution Overview
Problem
Projection exposure apparatuses in semiconductor lithography face challenges in maintaining imaging accuracy due to residual stresses caused by the contact between actuators, sensors, and structural parts, which can lead to changes in component positioning over time, affecting alignment and drift stability.
Innovation Solution
A projection exposure apparatus and method where a movable stop with a stop screw is used to allow for mechanical contact with a reference surface during adjustment, enabling the stop to be moved away from the surface after fixing, thereby avoiding transmission of forces and reducing mechanical stresses, and allowing for adjustable stop screw lengths to optimize component positioning.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If stops are fixed in mechanical contact with the reference surface during component mounting, then alignment precision is improved, but residual stresses are generated that cause position changes over time
Solution Approach 1:
The stop is designed to be movable relative to the component, allowing it to be adjusted during mounting to achieve precise alignment with the reference surface, and then retracted to avoid generating residual stresses. This dynamic design enables the stop to serve its alignment function temporarily and then withdraw to prevent stress-related position drift over time.
2Manufacturing precision
If exchangeable spacers are used to align actuators and sensors, then positioning accuracy is improved, but the complexity of the mounting process increases
Solution Approach 1:
The alignment function is extracted from the permanent structure and embodied in a separate, movable stop that can be independently adjusted and then retracted. This separates the alignment operation from the final mounted state, allowing precise positioning without requiring complex exchangeable spacers or permanent alignment features.
3Manufacturing precision
If multiple optical elements are made adjustable, then imaging accuracy is improved, but the number of components and adjustment operations increases
Solution Approach 1:
The movable stop serves multiple functions: it provides alignment reference during mounting, enables precise positioning of the component, and then retracts to avoid stress generation. This multi-functional design reduces the need for separate alignment mechanisms for each optical element, simplifying the overall system while maintaining imaging accuracy.
Data Source
AI summary
A projection exposure apparatus for semiconductor lithography includes a component and fixed to a structural part of the apparatus. The component and/or the structural part have/has a stop for bearing against a reference surface at the structural part and/or the component. The stop is movable relative to the component fixed and/or the structural part so that it can be moved away from the reference surface. A method for adjusting a component on a structural part of a projection exposure apparatus includes: securing a stop to the component or the structural part; positioning the component so that the stop comes into mechanical contact with a reference surface at the component or the structural part; fixing the component to the structural part; and moving the stop away from the reference surface.