Movable Substrate Support for 3D Coating Conformality

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Solution Overview

Problem

Coating three-dimensional (3D) substrates, such as medical implants, often face conformality issues due to limitations in existing atomic layer deposition (ALD) technologies, where precursors and process conditions can lead to non-conformal coatings, especially on substrates with high aspect ratios or smooth surfaces that hinder uniform deposition.

Innovation Solution

A substrate processing apparatus with a movable substrate support that changes the orientation of 3D substrates during processing, utilizing a sensitive mode to prevent damage, allowing all surfaces to be exposed to coating materials, and incorporating features like fibrous web or mesh supports to ensure uniform coating, which can be implemented in ALD reactors or other deposition technologies.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If ALD process is used to achieve conformal coating, then coating uniformity is improved, but coating completeness on 3D substrates deteriorates due to shadowing effects and limited precursor access

Engineering Contradiction:

Improvecoating uniformityVSAvoidcoating completeness

Core Design Contradiction:

Manufacturing precisionVSReliability

Solution Approach 1:

The substrate support is made movable to change orientation during the coating process. This dynamic adjustment allows precursors to access all surfaces of 3D substrates from multiple angles, eliminating shadowing effects and ensuring complete conformal coating on complex geometries

Inventive Principle:

Principle #15Dynamics

Solution Approach 2:

The invention introduces temporal dimension to the coating process by changing substrate orientation over time. Instead of static coating from one direction, the substrate is repositioned to expose different surfaces to the precursor flow, achieving complete coverage on all faces including vertical and hidden surfaces

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

2Reliability

If substrate support moves substrate during processing, then coating accessibility is improved, but mechanical damage to sensitive substrates increases

Engineering Contradiction:

Improvecoating accessibilityVSAvoidmechanical damage

Core Design Contradiction:

ReliabilityVSObject-affected harmful factors

Solution Approach 1:

A flexible mesh support structure is used instead of rigid holders. The mesh allows substrate repositioning and orientation changes while providing gentle support that prevents mechanical damage to sensitive substrates during movement

Inventive Principle:

Principle #30Flexible shells and thin films

Solution Approach 2:

The invention replaces strong mechanical gripping systems with a gentle mesh support system that relies on gravity and geometry for substrate positioning, minimizing mechanical stress and damage risk during orientation changes

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

3Manufacturing precision

If smooth substrate surfaces are used, then substrate quality is improved, but precursor penetration deteriorates leading to incomplete coating

Engineering Contradiction:

Improvesubstrate qualityVSAvoidprecursor penetration

Core Design Contradiction:

Manufacturing precisionVSReliability

Solution Approach 1:

By dynamically changing substrate orientation during coating, the invention ensures that smooth surfaces are periodically exposed to precursor flow from multiple directions, allowing precursors to penetrate and coat all surfaces including those that would otherwise be shadowed or inaccessible

Inventive Principle:

Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enhances coating conformality and prevents mechanical damage to sensitive substrates, improving the uniformity and quality of thin film deposition on 3D substrates, particularly in ALD and CVD processes, and can be applied to various substrate types including medical implants.

Implementation Method 1

an actuator configured to move the substrate support to change the orientation of said 3D substrate or said plurality of 3D substrates during substrate processing allowing each of the surfaces of said 3D substrate(s) to be exposed to coating

Methodology Applied

Scientific EffectMechanical movement: Mechanical Force

Implementation Method 2

at least one coating material inlet to the reaction chamber

Methodology Applied

Scientific EffectVapor deposition: Physical Vapour Deposition

Implementation Method 3

In general, ALD is able to produce conformal coatings

Methodology Applied

Scientific EffectAtomic layer deposition: Chemical Vapour Deposition

Data Source

PatentEP3715502B1Coating of 3-dimensional substrates

Publication Date: 2024.01.24 PICOSUN OY

Figure 1~2
Figure 3~4

AI summary

A substrate processing apparatus, comprising a reaction chamber, at least one coating material inlet to the reaction chamber, a movable substrate support to support 3D substrates to be coated, and an actuator configured to move the substrate support to change the orientation of said 3D substrates during substrate processing. A method for coating 3D substrates, the method comprising providing 3D substrates within a reaction chamber on a substrate support, feeding at least one coating material into the reaction chamber, and changing the orientation of said 3D substrates during substrate processing by actuating a movement of the substrate support.