Movable Support Module for Uniform Substrate Deposition
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Solution Overview
Problem
Existing deposition apparatuses face challenges in ensuring process reliability due to issues with substrate fixation and material deposition uniformity, particularly in the presence of substrate steps and varying support part configurations.
Innovation Solution
A deposition apparatus featuring a support module with position control parts allowing movable support parts along a direction axis perpendicular to their major surfaces, a mask assembly with a frame and cells, and a base substrate with separation films to manage substrate positioning and prevent shadowing, enhancing process reliability by ensuring consistent deposition across the substrate surface.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If support parts are fixed in position, then substrate fixation is stable, but deposition uniformity deteriorates due to substrate steps and varying configurations
Solution Approach 1:
The support parts are designed to be movable rather than fixed, allowing them to adjust their positions dynamically. Each support part can move independently along the substrate surface to adapt to steps and varying configurations, ensuring both stable fixation and uniform deposition across the entire substrate area.
2Manufacturing precision
If support parts are made movable to improve deposition uniformity, then manufacturing precision improves, but device complexity increases due to position control mechanisms
Solution Approach 1:
The support system is divided into multiple independent support parts, each capable of individual movement. This segmentation allows each part to independently adapt to local substrate variations without requiring a complex centralized control system, simplifying the overall device architecture while maintaining deposition uniformity.
3Manufacturing precision
If mask assembly is positioned close to substrate, then deposition precision improves, but shadowing effects increase due to substrate steps
Solution Approach 1:
The mask assembly is designed with movable support parts that can dynamically adjust their positions to follow substrate steps and variations. This dynamic adaptation allows the mask to maintain close proximity to the substrate surface for precise deposition while compensating for steps to minimize shadowing effects.
Data Source
AI summary
A deposition apparatus includes: a support module having a plurality of support parts coupled to a target substrate; a base substrate coupled to the support module; a connection member for connecting the plurality of support parts to the base substrate; and a mask assembly configured to mask a deposition material provided to the target substrate. The support module further includes position control parts, which control the plurality of support parts to be movable along a direction axis perpendicular to a major surface of each of the support parts, respectively.