Movable Upper Frame Conveyor for Narrow Deposition Apparatus
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Solution Overview
Problem
Conventional deposition apparatuses require a large installation area due to immovable lower and upper support mechanisms, which complicates maintenance and increases space requirements, especially with the upsizing of glass substrates.
Innovation Solution
A conveyor system with a frame configuration allowing the upper and lower support mechanisms to be separately movable, enabling the upper frame to rotate and form space above the lower frame, thus reducing the necessary installation area by allowing the deposition treatment and carrier transfer passages to be closer together.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the lower support mechanism and upper support mechanism are fixed immovably to ensure stable carrier transfer, then transfer reliability is improved, but the installation area increases and maintenance becomes complicated
Solution Approach 1:
The patent applies the dynamics principle by making the upper support mechanism movable relative to the lower support mechanism. The upper support mechanism can be positioned at different locations along the carrier transfer path, allowing it to move out of the way during maintenance of the cathode member while still providing stable support during normal operation. This dynamic positioning resolves the contradiction between maintaining transfer stability and reducing installation area/maintenance complexity.
2Adaptability or versatility
If the cathode member is made larger to accommodate upsized glass substrates, then substrate processing capability is improved, but the required inner court area increases
Solution Approach 1:
The patent applies dimensionality change by utilizing the vertical dimension and temporal sequencing. The upper support mechanism moves vertically and temporally (during maintenance cycles) to allow the cathode member to be positioned in the space above the lower support mechanism. This enables larger cathode members for upsized substrates without proportionally increasing the horizontal inner court area, as the space utilization becomes three-dimensional rather than purely two-dimensional.
3Manufacturing precision
If the lower support mechanism and upper support mechanism are attached to the same frame to prevent alignment discrepancies, then transfer precision is improved, but the device complexity increases
Solution Approach 1:
The patent applies segmentation by dividing the support mechanism into separate movable and fixed components. The lower support mechanism remains fixed to the frame for stability, while the upper support mechanism is segmented as a movable component that can be repositioned. This segmentation maintains alignment precision during operation while reducing overall device complexity and enabling easier maintenance compared to a fully integrated fixed structure.
Data Source
AI summary
A conveyor and a deposition apparatus, and a maintenance method thereof are disclosed. The conveyor includes a frame; a lower support mechanism for supporting a carrier on which is longitudinally mounted a substrate and for transferring the carrier; and an upper support mechanism for supporting the carrier, in which the frame comprises a lower frame and an upper frame, and in which the lower support mechanism is provided on the lower frame and the upper support mechanism is provided on the upper frame, the upper frame and the lower frame being configured to be separately movable. Therefore, with the rotational movement of the upper frame, it is possible to arrange a cathode member in a space formed above the lower frame. This can make the spacing between the deposition treatment passage and the carrier transfer passage small. As a result, it is possible to make an inner court of the deposition apparatus narrow. Therefore, in the conveyor capable of transferring a carrier and in the deposition apparatus including the conveyor and further including a vacuum treatment apparatus and a transfer system, it is possible to make the installation area thereof small and narrow.