Movable Wafer Holder Structure for Scratch-Free Transport
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Solution Overview
Problem
Semiconductor wafers, particularly those with high-electron-mobility transistors, are prone to damage during transportation due to collisions and scratching when stacked in containers, necessitating a protective and accessible wafer holder to minimize harm.
Innovation Solution
A wafer holder with a carrier plate and movable blocking devices configured to move along a guiding structure, featuring curved walls that surround the carrier surface, and elastic layers to cushion and protect the wafers, allowing for safe loading and unloading without scratching or impact.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If wafers are stacked into a container for transportation, then transportation efficiency is improved, but wafers may be damaged by collision and scratching
Solution Approach 1:
The patent applies beforehand cushioning by incorporating elastic layers at the bottom and side walls of the wafer holder before wafers are loaded. These elastic layers provide preemptive cushioning that absorbs impact forces and prevents scratching during transportation, allowing wafers to be safely stacked without damage while maintaining transportation efficiency.
Solution Approach 2:
The patent segments the protective structure into distinct components: a bottom elastic layer and side wall elastic layers. This segmentation allows each component to independently perform its protective function - the bottom layer prevents collision damage from below, while the side layers prevent scratching from lateral contact, enabling safe stacking without compromising transportation efficiency.
2Object-affected harmful factors
If blocking devices are added to protect wafers, then wafer protection is improved, but device complexity increases
Solution Approach 1:
The patent applies dynamics by designing blocking devices with movable guiding structures that allow the blocking devices to move along guided paths. This dynamic capability enables the blocking devices to adapt to wafer insertion and removal operations while maintaining protective positioning, providing effective wafer protection without requiring a complex fixed structure.
Solution Approach 2:
The patent uses guiding structures as intermediaries between the blocking devices and the holder body. These guiding structures mediate the movement and positioning of blocking devices, simplifying the overall structure by providing a straightforward mechanical guidance system rather than complex constraint mechanisms, thus reducing device complexity while maintaining protection.
3Object-affected harmful factors
If elastic layers are used to cushion wafers, then wafer protection is improved, but manufacturing complexity increases
Solution Approach 1:
The patent employs flexible elastic layers as thin film structures at the bottom and side walls of the holder. These elastic layers are manufactured as simple planar or curved sheets that are then installed into the holder cavity, avoiding complex molded or formed structures. This approach maintains ease of manufacture while providing effective cushioning protection for wafers during transportation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The wafer holder provides a safe and easy loading/unloading process, effectively protecting the wafers by limiting sideways movement and using elastic layers to prevent damage during shipping and handling.
Implementation Method 1
side elastic layers are coupled to the carrier plate through the guiding structure
Data Source
AI summary
A wafer holder includes a carrier plate, and blocking devices. The carrier plate includes a base and a guiding structure. The base has a carrier surface. The guiding structure surrounds the base. The blocking devices are coupled to the carrier plate through the guiding structure, and the blocking devices are configured to move along the guiding structure. Each of the blocking devices has a curved wall, and the curved walls at least partially surrounds an area above the carrier surface.