Movable Coating Window Cooling for High-Rate Vacuum Deposition
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Solution Overview
Problem
Vacuum deposition systems face challenges with unproductive coating contamination, limited substrate cooling, and complex cleaning processes due to the design of coating windows and chill rolls, which restrict coating homogeneity and productivity.
Innovation Solution
A device with a movable main body housing the deposition source, coating window, and cooling system, along with a shield to redirect unused coating material, allowing easy window replacement and maintaining low temperatures for improved cooling efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If the coating window is connected to the chill roll to ensure sufficient cooling, then the coating window temperature is reduced, but the assembly becomes difficult and costly, and the coating window removal requires great effort
Solution Approach 1:
The device is divided into a movable main body housing that contains the coating window and cooling system as an integrated module. This module can be moved relative to the vacuum chamber, allowing the coating window to be cooled effectively during operation while enabling easy removal and replacement of the entire module without complex disassembly of cooling connections.
Solution Approach 2:
The movable main body acts as an intermediary between the cooling system and the coating window. It provides a standardized interface that simplifies the connection and removal process, allowing the coating window to be cooled during deposition while enabling straightforward module replacement for maintenance.
2Productivity
If the coating rate is increased to improve productivity, then the deposition rate increases, but the coating window becomes excessively hot
Solution Approach 1:
The cooling device is merged with the coating window assembly within the movable main body, creating an integrated cooling system that directly contacts the coating window. This ensures efficient heat removal during high-rate deposition processes, allowing increased productivity without excessive temperature buildup.
Solution Approach 2:
The cooling device operates continuously during the deposition process, maintaining the coating window at an acceptable temperature throughout the entire deposition cycle. This continuous cooling enables sustained high deposition rates without temperature-related interruptions or limitations.
3Manufacturing precision
If the coating window edge is heavily coated to achieve high coating homogeneity, then the coating quality improves, but the coating window temperature increases
Solution Approach 1:
The cooling device is positioned to provide targeted cooling at the coating window edges where heavy coating occurs and heat generation is highest. This localized cooling approach allows the edges to maintain adequate temperature despite heavy coating, preserving coating homogeneity while preventing excessive temperature rise.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration reduces heat on the coating window, enhances coating homogeneity, and increases deposition rates while simplifying maintenance and cleaning processes, thereby improving product quality and productivity.
Implementation Method 1
at least one cooling device connected to the at least one coating window and mounted on the movable main body
Implementation Method 2
Systems for coating films onto subtsrates in a vacuum often use Physical Vapor Deposition (PVD) or Chemical Vapour Deposition (CVD) processes
Data Source
Figure 1~2
Figure 3~4
AI summary
The present disclosure relates to a device for vacuum deposition systems, comprising: a movable main body, at least one deposition source mounted on the movable main body, at least one coating window associated with the at least one deposition source and mounted on the movable main body, and at least one cooling device connected to the at least one coating window and mounted on the movable main body.