Organosilicon Nano-Coating via Moving Substrate Plasma Deposition

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Solution Overview

Problem

Current plasma chemical vapor deposition methods for organosilicon coatings suffer from uneven thickness, low production efficiency, and poor environmental sustainability due to stationary substrates and the use of solvents, leading to inadequate corrosion resistance and heat dissipation in electronic devices.

Innovation Solution

A method where the substrate is moved during plasma discharge, using organosilicon monomers with high cross-linking potential to form dense nano-coatings without solvents, achieving precise thickness control and improved corrosion resistance by linking substrate movement with plasma energy output.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If the substrate is kept stationary during plasma deposition, then the coating process is simple to control, but the coating thickness becomes uneven and production efficiency is low

Engineering Contradiction:
Improvecoating thickness uniformityVSAvoidsubstrate movement mechanism
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The substrate is transformed from a stationary state to a moving state during plasma deposition. The substrate moves through the plasma discharge region, allowing uniform exposure to reactive species and enabling consistent coating thickness across the substrate surface. This dynamic approach resolves the contradiction by sacrificing simple control for improved manufacturing precision.

Inventive Principle:
Principle #15Dynamics

2Ease of manufacture

If solvent-based polymer coatings are used for corrosion protection, then the coating process is easy to apply, but environmental pollution and health hazards increase

Engineering Contradiction:
Improvecoating application simplicityVSAvoidenvironmental pollution
Core Design Contradiction:
Ease of manufactureVSObject-generated harmful factors

Solution Approach 1:

The solvent-based liquid coating process is replaced with a plasma-based physical/chemical deposition process. Plasma provides the energy needed to decompose monomer vapors and form protective coatings without requiring solvents. This substitution eliminates environmental pollution while maintaining ease of manufacture through vapor-phase deposition.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The process uses organic solvent-free environment, replacing harmful solvent-based atmospheres with inert or controlled atmospheric conditions during deposition. This eliminates the release of volatile organic compounds while maintaining effective coating formation through plasma activation.

Inventive Principle:
Principle #39Inert atmosphere (Inert environment)

3Reliability

If thick polymer film coatings are applied for adequate protection, then corrosion resistance improves, but heat dissipation and signal transmission are adversely affected

Engineering Contradiction:
Improvecorrosion resistanceVSAvoidheat dissipation
Core Design Contradiction:
ReliabilityVSTemperature

Solution Approach 1:

The coating thickness parameter is optimized to a thin film regime (nanometer to micrometer scale) rather than thick film applications. At this reduced thickness, the coating provides sufficient corrosion protection through dense cross-linked structure while maintaining thermal conductivity and electrical signal transmission properties of the underlying substrate.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The protective coating is formed as a composite structure with inorganic cross-linked polymer networks embedded in an organic matrix. This composite architecture provides enhanced corrosion resistance at reduced thickness compared to conventional organic coatings, allowing better heat dissipation and signal transmission while maintaining protective functionality.

Inventive Principle:
Principle #40Composite materials

4Object-affected harmful factors

If plasma deposition is used for conformal coating, then solvent damage is avoided, but the process requires high vacuum and high temperature conditions

Engineering Contradiction:
Improvesolvent damage avoidanceVSAvoidenergy consumption for vacuum and temperature
Core Design Contradiction:
Object-affected harmful factorsVSUse of energy by moving object

Solution Approach 1:

The plasma deposition parameters are optimized to operate at moderate vacuum levels and temperatures suitable for temperature-sensitive electronic components. By adjusting plasma power, pressure, and deposition time, the process achieves effective coating formation without requiring extreme conditions, thus reducing energy consumption while maintaining the advantage of solvent-free deposition.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The method enhances the uniformity and compactness of the coating, reduces material usage and waste, and significantly improves corrosion resistance and heat dissipation, extending the service life of electronic devices in corrosive environments.

Implementation Method 1

A method where the substrate is moved during plasma discharge

Methodology Applied
Scientific EffectPlasma: Plasma

Implementation Method 2

plasma chemical vapor deposition technology

Methodology Applied
Scientific EffectChemical vapor deposition: Chemical Vapour Deposition

Data Source

PatentUS11185883B2Methods for preparing nano-protective coating
Publication Date: 2021.11.30 JIANGSU FAVORED NANOTECHNOLOGY CO LTD
  • US11185883B2 patent drawing

AI summary

Methods and associated systems for preparing a nano-protective coating are disclosed. The method includes (1) placing a substrate in a reaction chamber of a nano-coating preparation equipment; (2) introducing an inert gas, wherein the inert gas includes helium (He) and/or argon (Ar); (3) turning on a movement mechanism so that the substrate is moved in the reaction chamber; (4) introducing a monomer vapor into the reaction chamber to achieve a vacuum degree of 30-300 mTorr; and (5) turning on a plasma discharge for chemical vapor deposition to form an organosilicon nano-coating on a surface of the substrate.