Moving Target Sputtering for Flexible Indium Tin Oxide Films
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Solution Overview
Problem
Existing methods for manufacturing indium tin oxide (ITO) using a stationary target result in a rigid and less conductive film, which can crack easily when distorted, limiting its application in flexible substrates and devices.
Innovation Solution
A method involving the sputtering of indium and tin from a moving target onto a substrate, where the target moves along a path over the substrate to form multiple layers of ITO, allowing for concurrent sputtering and annealing, which enhances conductivity and flexibility.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If a stationary target is used during sputtering, then the manufacturing process is simpler, but the resulting indium tin oxide film has higher sheet resistance and lower conductivity
Solution Approach 1:
The patent applies the dynamics principle by transitioning from a stationary target to a moving target during sputtering. The target moves along a path over the substrate, creating dynamic deposition conditions that produce multiple overlapping layers with varying orientations. This dynamic approach reduces sheet resistance to less than 0.5 Ω/□ and improves conductivity compared to stationary target methods.
2Ease of operation
If a stationary target is used during sputtering, then the process is easier to control, but the film becomes rigid and cracks easily when distorted
Solution Approach 1:
The moving target creates dynamic deposition patterns that result in a more flexible film structure. The target moves along a path and may complete multiple cycles, depositing material in a way that creates overlapping layers with reduced internal stress. This dynamic process produces films that can withstand distortion without cracking, enabling use in flexible substrates.
Solution Approach 2:
The patent applies segmentation by creating multiple layers of indium tin oxide through the moving target process. Each pass of the target deposits a layer, and multiple cycles create stacked layers with different orientations and properties. This segmented structure improves overall film flexibility and reduces crack propagation compared to a single rigid layer.
3Reliability
If the target moves along a path over the substrate, then multiple layers are formed with improved conductivity, but the device complexity increases
Solution Approach 1:
The patent implements a moving target system that travels along a defined path over the substrate during sputtering. This dynamic configuration, while more complex than a stationary target, achieves sheet resistance of less than 0.5 Ω/□ through the creation of multiple overlapping layers with optimized deposition angles and coverage.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method achieves a low sheet resistance of less than 0.5 Ω/□, increased flexibility, and improved conductivity, making the indium tin oxide film suitable for use in flexible substrates and devices such as display devices, electrochromic windows, and flying vehicles.
Implementation Method 1
a method involving the sputtering of indium and tin from a moving target onto a substrate
Implementation Method 2
a portion of the indium tin oxide anneals as the target moves away from the portion of the indium tin oxide
Data Source
AI summary
A method of manufacturing indium tin oxide includes sputtering indium and tin from a target onto a substrate, the sputtering including moving the target along a path over the substrate. The indium tin oxide may have a sheet resistance less than 0.5 Ω/□. An indium film includes: a first moving target sputtered indium tin oxide layer; a second moving target sputtered indium tin oxide layer on the first moving target sputtered indium tin oxide layer; and a third moving target sputtered indium tin oxide layer on the second moving target sputtered indium tin oxide layer. A transparency includes the indium tin oxide, and a flying vehicle includes the transparency.