MRAM MTJ Ring Layout for Integrated Sensing and Temperature Compensation

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Solution Overview

Problem

Current magnetoresistive random access memory (MRAM) devices face challenges such as high chip area, high cost, high power consumption, and sensitivity to temperature variations, limiting their effectiveness in magnetic field sensing applications.

Innovation Solution

A semiconductor device design featuring a substrate with an array region surrounded by a ring of magnetic tunneling junction (MTJ) regions and metal interconnect patterns, which includes multiple MTJ regions extending in different directions and gaps to optimize device performance, reducing direct contact and enhancing functionality.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If magnetic field sensor technologies (AMR sensors, GMR sensors, MTJ sensors) are used, then magnetic field sensing capability is achieved, but chip area increases and cost increases

Engineering Contradiction:
Improvemagnetic field sensing capabilityVSAvoidchip area
Core Design Contradiction:
ReliabilityVSArea of stationary object

Solution Approach 1:

The patent combines the magnetic field sensing function with the MRAM memory structure by integrating MTJ regions that serve dual purposes: storing data in the array region and sensing magnetic fields in the periphery region. This merging eliminates the need for separate magnetic field sensor devices, thereby reducing overall chip area while maintaining sensing capability.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The MTJ regions in the periphery are designed to perform multiple functions: they can operate as magnetic field sensors for compass functionality, serve as redundancy for the MRAM array, and provide temperature compensation. This multi-functionality reduces the need for separate dedicated sensor components, thereby reducing chip area.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Reliability

If magnetic field sensor technologies (AMR sensors, GMR sensors, MTJ sensors) are used, then magnetic field sensing capability is achieved, but manufacturing cost increases

Engineering Contradiction:
Improvemagnetic field sensing capabilityVSAvoidmanufacturing cost
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The patent merges the magnetic field sensing function with the existing MRAM manufacturing process by using the same MTJ fabrication techniques. The periphery MTJ regions are created using the same material layers and deposition processes as the memory array, eliminating the need for separate sensor fabrication steps and reducing manufacturing cost.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The same MTJ structure and materials are used for both memory storage and magnetic field sensing functions. By making the periphery regions multi-functional (sensing, redundancy, temperature compensation), the patent avoids the need for separate dedicated sensor components, thereby reducing manufacturing cost.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Reliability

If conventional MRAM devices are used, then data storage capability is achieved, but power consumption is high

Engineering Contradiction:
Improvedata storage capabilityVSAvoidpower consumption
Core Design Contradiction:
ReliabilityVSUse of energy by moving object

Solution Approach 1:

The periphery MTJ regions automatically provide temperature compensation and magnetic field sensing functions without requiring additional power input. The magnetoresistive effect naturally responds to temperature and magnetic field changes, enabling the device to self-adjust and reduce power consumption for active temperature compensation and sensing operations.

Inventive Principle:
Principle #25Self-service

4Reliability

If conventional MRAM devices are used, then data storage capability is achieved, but sensitivity to temperature variation is high

Engineering Contradiction:
Improvedata storage capabilityVSAvoidsensitivity to temperature variation
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The periphery MTJ regions act as temperature sensors that continuously monitor temperature variations. This temperature information is fed back to the control logic, which then compensates for temperature-induced resistance changes in the memory array, thereby reducing sensitivity to temperature variation and improving data storage reliability.

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The periphery MTJ regions are designed to perform temperature compensation as one of their functions. By using the same MTJ structure for multiple purposes (sensing, redundancy, temperature compensation), the patent provides integrated temperature compensation that reduces sensitivity to temperature variation without requiring separate compensation circuits.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The design improves the efficiency and reduces the power consumption of MRAM devices, making them less sensitive to temperature variations while maintaining data storage capabilities even without an electrical source.

Implementation Method 1

Magnetoresistance (MR) effect has been known as a kind of effect caused by altering the resistance of a material through variation of outside magnetic field. The physical definition of such effect is defined as a variation in resistance obtained by dividing a difference in resistance under no magnetic interference by the original resistance.

Methodology Applied
Scientific EffectMagnetoresistance effect: Magnetoresistance

Implementation Method 2

the characterization of utilizing GMR materials to generate different resistance under different magnetized states could also be used to fabricate MRAM devices

Methodology Applied
Scientific EffectMagnetic field sensing: Magnetic Field

Data Source

PatentUS11877520B2Magnetoresistive random access memory having a ring of magnetic tunneling junction region surrounding an array region
Publication Date: 2024.01.16 UNITED MICROELECTRONICS CORP
  • US11877520B2 patent drawing
  • US11877520B2 patent drawing
  • US11877520B2 patent drawing

AI summary

A semiconductor device includes a substrate having an array region defined thereon, a ring of magnetic tunneling junction (MTJ) region surrounding the array region, a gap between the array region and the ring of MTJ region, and metal interconnect patterns overlapping part of the ring of MTJ region. Preferably, the array region includes a magnetic random access memory (MRAM) region and a logic region and the ring of MTJ region further includes a first MTJ region and a second MTJ region extending along a first direction and a third MTJ region and a fourth MTJ region extending along a second direction.