MRAM Ring MTJ Layout for Area and Power Optimization

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Solution Overview

Problem

Current magnetoresistive random access memory (MRAM) devices face challenges such as high chip area, high cost, high power consumption, and sensitivity to temperature variations, limiting their effectiveness in magnetic field sensor applications.

Innovation Solution

The design incorporates a semiconductor device with a substrate featuring an array region surrounded by multiple rings of magnetic tunneling junction (MTJ) regions and metal interconnect patterns, optimizing the arrangement and gaps between these regions to reduce chip area and power consumption while enhancing sensitivity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Area of stationary object

If conventional MRAM device structures are used, then magnetic field sensing function is achieved, but chip area is large

Engineering Contradiction:
Improvechip areaVSAvoidsensing sensitivity
Core Design Contradiction:
Area of stationary objectVSMeasurement precision

Solution Approach 1:

The device is divided into distinct functional regions: a first region containing the sensing element and a second region containing the reference element, separated by an isolation structure. This segmentation allows independent optimization of each region, enabling compact layout while maintaining sensing performance through proper spatial arrangement of magnetic field interaction zones.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent transitions from planar arrangement to three-dimensional stacking by placing the sensing element and reference element in different vertical layers. The isolation structure extends vertically to separate the magnetic field interaction zones, allowing overlapping horizontal footprints while maintaining magnetic field isolation, thus reducing chip area without compromising sensitivity.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Use of energy by moving object

If conventional MRAM device structures are used, then magnetic field sensing function is achieved, but power consumption is high

Engineering Contradiction:
Improvepower consumptionVSAvoidsensing sensitivity
Core Design Contradiction:
Use of energy by moving objectVSMeasurement precision

Solution Approach 1:

The patent extracts and eliminates the magnetization switching operation from the sensing mechanism. By using a reference element with fixed magnetization direction and comparing magnetic field effects through resistance changes in the magnetic tunneling junction, the design removes the need for high-power write operations, achieving low-power consumption while maintaining sensing sensitivity through differential measurement.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The sensing element and reference element form a self-comparing system where the reference element provides a stable baseline that automatically compensates for temperature drift and process variations. The differential resistance measurement between the sensing element and reference element enables self-calibration without external power-intensive operations, maintaining sensitivity while minimizing power consumption.

Inventive Principle:
Principle #25Self-service

3Temperature

If conventional MRAM device structures are used, then magnetic field sensing function is achieved, but temperature stability is poor

Engineering Contradiction:
Improvetemperature stabilityVSAvoidsensing sensitivity
Core Design Contradiction:
TemperatureVSMeasurement precision

Solution Approach 1:

The patent assigns different magnetic property characteristics to different regions: the reference element is designed with specific magnetization direction and coercivity optimized for temperature stability, while the sensing element is optimized for magnetic field response. The isolation structure creates distinct magnetic environments, allowing each region to have locally optimized properties that collectively achieve both temperature stability and sensing sensitivity.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The reference element serves as an internal temperature compensation mechanism, providing a stable reference that automatically tracks and compensates for temperature-induced drift in the sensing element. The differential measurement between sensing and reference elements cancels out common-mode temperature effects, maintaining sensing accuracy across temperature variations without external temperature control.

Inventive Principle:
Principle #25Self-service

4Ease of manufacture

If conventional MRAM device structures are used, then magnetic field sensing function is achieved, but manufacturing cost is high

Engineering Contradiction:
Improvemanufacturing costVSAvoidsensing sensitivity
Core Design Contradiction:
Ease of manufactureVSMeasurement precision

Solution Approach 1:

The patent combines the sensing element and reference element into a single integrated structure using the same magnetic tunneling junction fabrication process. Both elements share common layers including the tunnel barrier and electrode structures, allowing simultaneous formation in one manufacturing run. This merging reduces fabrication steps, material usage, and process complexity while maintaining the differential sensing capability required for high sensitivity.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The magnetic tunneling junction structure serves multiple functions: it acts as both the sensing element and reference element, provides magnetic field sensing capability, and enables temperature compensation through differential measurement. The isolation structure simultaneously provides electrical isolation, magnetic field confinement, and mechanical support. This multi-functionality reduces the number of separate components and fabrication processes needed, lowering manufacturing cost while maintaining sensing performance.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration improves the efficiency and reliability of MRAM devices by reducing chip area, lowering power consumption, and enhancing temperature stability, addressing the shortcomings of existing MRAM technologies.

Implementation Method 1

Magnetoresistance (MR) effect has been known as a kind of effect caused by altering the resistance of a material through variation of outside magnetic field. The physical definition of such effect is defined as a variation in resistance obtained by dividing a difference in resistance under no magnetic interference by the original resistance.

Methodology Applied
Scientific EffectMagnetoresistance effect: Magnetoresistance

Implementation Method 2

various magnetic field sensor technologies such as anisotropic magnetoresistance (AMR) sensors, GMR sensors, magnetic tunneling junction (MTJ) sensors have been widely developed in the market

Methodology Applied
Scientific EffectMagnetic tunneling junction effect:

Implementation Method 3

metal interconnect patterns overlapping part of the ring of MTJ region

Methodology Applied
Scientific EffectElectromagnetic induction: Electromagnetic Induction

Data Source

PatentUS10930839B2Magnetoresistive random access memory having a ring of magnetic tunneling junction region surrounding an array region
Publication Date: 2021.02.23 UNITED MICROELECTRONICS CORP
  • US10930839B2 patent drawing
  • US10930839B2 patent drawing
  • US10930839B2 patent drawing

AI summary

A semiconductor device includes a substrate having an array region defined thereon, a ring of magnetic tunneling junction (MTJ) region surrounding the array region, a gap between the array region and the ring of MTJ region, and metal interconnect patterns overlapping part of the ring of MTJ region. Preferably, the ring of MTJ region comprises an octagon and the ring of MTJ region includes a first MTJ region and a second MTJ region extending along a first direction, a third MTJ region and a fourth MTJ region extending along a second direction, a fifth MTJ region and a sixth MTJ region extending along a third direction, and a seventh MTJ region and an eighth MTJ region extending along a fourth direction.