MRAM Magnetic Shield Layer Closed Path Design

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Solution Overview

Problem

Magnetic random access memory (MRAM) chips are susceptible to external magnetic fields, which can interfere with their operations such as writing, reading, and data storage, necessitating a solution to block these fields effectively.

Innovation Solution

A semiconductor device with a magnetic shield layer having a closed magnetic path surrounding the memory cell array area of the MRAM chip, utilizing materials like Ni, Fe, Co, and their alloys, to prevent external magnetic fields from entering and influencing the magnetoresistive elements.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a magnetic shield layer is added to block external magnetic fields, then the reliability of the MRAM chip is improved, but the device complexity increases

Engineering Contradiction:
Improveoperational stabilityVSAvoidstructural complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The magnetic shield layer is divided into multiple segments: a first magnetic shield layer positioned at a first position and a second magnetic shield layer positioned at a second position. This segmentation allows the shield to block external magnetic fields from different directions while maintaining a simpler overall structure compared to a single comprehensive shield.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Magnetic shield layers are strategically positioned at specific locations where external magnetic field interference is most likely to occur. The first magnetic shield layer is placed at a first position and the second magnetic shield layer at a second position, providing localized protection where it is most needed rather than uniform shielding throughout the entire device.

Inventive Principle:
Principle #3Local quality

2Object-affected harmful factors

If magnetic shield layers are positioned close to the MRAM chip to maximize shielding effect, then the blocking capability is improved, but the area occupied by the shield structure increases

Engineering Contradiction:
Improvemagnetic field blockingVSAvoidshield structure area
Core Design Contradiction:
Object-affected harmful factorsVSArea of stationary object

Solution Approach 1:

The magnetic shielding function is divided into multiple discrete layers positioned at different locations. This segmentation allows for more efficient use of space compared to a single large shield, as each layer can be optimized for its specific position and function.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The magnetic shield layers are arranged in different spatial positions (first position and second position) rather than expanding in a single plane. This multi-dimensional arrangement provides effective magnetic field blocking while minimizing the overall area occupied by the shield structure.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The magnetic shield layer effectively stabilizes the operations of the MRAM chip by blocking external magnetic fields, ensuring accurate data writing, reading, and storage without interference.

Implementation Method 1

a magnetic shield layer separated from the MRAM chip, surrounding the memory cell array area in a circumferential direction of the MRAM chip, and having a closed magnetic path

Methodology Applied
Scientific EffectMagnetic shielding: Magnetic Field

Data Source

PatentUS9190361B2Semiconductor device and method of manufacturing the same
Publication Date: 2015.11.17 KIOXIA CORP
  • US9190361B2 patent drawing
  • US9190361B2 patent drawing
  • US9190361B2 patent drawing

AI summary

According to one embodiment, a semiconductor device includes a MRAM chip including a semiconductor substrate and a memory cell array area includes magnetoresistive elements which are provided on the semiconductor substrate, and a magnetic shield layer separated from the MRAM chip, surrounding the memory cell array area in a circumferential direction of the MRAM chip, and having a closed magnetic path.