U-Shaped MSM Interconnection for Gas Panel Assembly
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Solution Overview
Problem
Conventional gas panel systems for semiconductor processing are bulky, expensive to manufacture, and difficult to service due to misalignment issues and the need for numerous components, which complicates the delivery of precisely metered, contaminant-free gases.
Innovation Solution
A gas panel assembly utilizing U-shaped MSM interconnection components that straddle modular fluid inserts on a planar support plate, providing alignment and a hermetic seal through alignment pins and slots, eliminating the need for additional fasteners and support structures, allowing for compact and easily serviceable fluidic systems.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If conventional VCR connectors and welded tubing systems are used to connect gas panel components, then fluidic connections can be established, but the system occupies a relatively large amount of space and requires significant space between components for servicing
Solution Approach 1:
The gas panel system is divided into modular components (flow controllers, valves, regulators) that can be independently serviced. The MSM architecture allows each component to be separately mounted and removed from the panel without affecting other components, enabling maintenance without spreading out surrounding components.
Solution Approach 2:
The patent transitions from traditional welded/tubing connections to MSM modular interfaces that mount components in a different spatial arrangement. The MSM components use a standardized mounting interface that allows compact positioning on the panel surface, reducing the area required between components compared to traditional welding access requirements.
2Reliability
If combination VCR connector and welded tubing systems are used, then components can be connected, but misalignment at VCR fittings can result in leakage
Solution Approach 1:
The MSM modular interface incorporates self-aligning features where the component mounting interface automatically positions itself correctly on the panel. The standardized MSM connection geometry ensures proper alignment without requiring manual adjustment or precision manual welding, eliminating misalignment-induced leakage.
Solution Approach 2:
The patent changes the connection parameter from manual welding/VCR fitting alignment to a standardized MSM mechanical interface with fixed geometric relationships. This parameter change from manual precision assembly to standardized mechanical mounting ensures consistent alignment and seal integrity across all connections.
3Area of stationary object
If modular surface mount (MSM) fluidic components are used, then the size of fluidic systems is reduced, but the components require standardized interfaces and interconnecting gas conduits for fluid routing
Solution Approach 1:
The MSM architecture employs universal standardized interfaces (such as SEMI F86-0304 and F87-0304) that allow the same mounting and connection mechanism to be used across all fluidic components. This universality means that valves, flow controllers, regulators, and other components all use the same interface standard, simplifying the overall system design despite the modular nature.
Solution Approach 2:
The patent combines the mounting function and fluid connection function into a single integrated MSM interface. The standardized interface simultaneously provides mechanical mounting to the panel and fluidic connection pathways, eliminating the need for separate mounting structures and individual conduit routing for each component.
4Reliability
If conventional gas panel systems are used, then process gases can be delivered, but the systems are expensive to manufacture due to difficult manufacturing processes
Solution Approach 1:
The gas panel is segmented into standardized modular components that can be manufactured independently using standard MSM manufacturing processes. This segmentation allows each component to be produced separately with consistent quality control, reducing overall manufacturing complexity and cost compared to custom-welded assemblies.
Solution Approach 2:
The patent changes the manufacturing parameter from custom welding and assembly operations to standardized MSM component fabrication and mounting. The standardized interfaces and mounting procedures enable more efficient, repeatable manufacturing processes that reduce labor costs and improve consistency, while maintaining reliable gas delivery function.
Data Source
Figure 1
Figure 2~4
AI summary
A gas panel assembly having at least one U-shaped MSM interconnection component (6) is disclosed where the interconnection component (6) straddles at least a pair of adjacent modular inserts (4) and is fastened to planar support plate (1) such that the fluidic inserts (4) are held immobile.