MSVD Coating Process Single Zone Mode Switching
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Solution Overview
Problem
Magnetron sputtering deposition (MSVD) processes in multi-zone coaters are limited by the need for multiple zones to operate in specific modes, leading to inefficiencies and high costs in expanding existing coaters, as different modes can result in gas 'bleed through' affecting deposition rates and types of coatings that can be applied.
Innovation Solution
Running a single zone of a MSVD coater in at least two different modes, such as metal and transition or oxide modes, by carefully selecting targets and controlling the Gibbs Free Energy of formation to minimize bleed through and allow for the deposition of complex coatings with fewer zones.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If multiple zones are used to operate in different modes for coating deposition, then the ability to deposit complex coatings is improved, but the device complexity and cost of expanding existing coaters increases
Solution Approach 1:
The patent applies multi-functionality by enabling a single zone to perform multiple coating deposition functions by switching between different operational modes (metal mode, transition mode, oxide mode). This allows one zone to deposit different types of coating layers (metal, oxide, intermediate layers) depending on the gas atmosphere and target material, thereby eliminating the need for separate zones for each function and reducing overall device complexity while maintaining the ability to deposit complex multi-layer coatings
2Productivity
If more zones are added to increase coating capacity, then the productivity is improved, but the cost of expansion increases significantly
Solution Approach 1:
The patent enables existing coaters to increase productivity without physical expansion by implementing mode-switching capability in single zones. A single zone can sequentially or simultaneously deposit metal layers, oxide layers, and intermediate layers by changing gas atmospheres and target materials, effectively multiplying the functional capacity of each zone without requiring additional hardware investment
3Adaptability or versatility
If different bays in a zone are run in different modes, then the coating versatility is improved, but gas bleed through occurs which reduces manufacturing precision
Solution Approach 1:
The patent introduces reactive gas (oxygen or nitrogen) as an intermediary substance that mediates between different operational modes in different bays. The reactive gas acts as a barrier that prevents harmful gas bleed-through from oxide mode bays to metal mode bays, while still allowing the system to benefit from having multiple modes available in different zones. This intermediary gas layer enables mode diversity without compromising deposition quality
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach reduces the number of zones required for coating applications, enhancing efficiency and allowing for the deposition of complex coatings like silver and zinc oxide layers in a single pass, thereby reducing production costs and improving process efficiency.
Implementation Method 1
magnetron sputtering deposition (MSVD) processes
Implementation Method 2
magnetron sputtered vacuum deposition ('MSVD')
Implementation Method 3
the gaseous atmosphere in the zone consists of both non-reactive gas and a reactive gas, and the zone is run to deposit a layer of oxide on the substrate
Data Source
AI summary
The present invention is a method of coating a substrate in a single zone of a MSVD coater wherein the zone includes at least two bays, comprising running a first bay of a zone including a first target in metal mode and running the second bay including a second target in transition or oxide mode, wherein the ΔG of formation of the target oxide being run in transition mode or oxide mode is equal to or less than −160 kcal/mole O2 or the difference in ΔG between the target being run in transition mode or oxide mode and the target being run in metal mode is at least 60 kcal/mole O2.