MTJ Device Asymmetric Contact Plug for Short Circuit Prevention
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Solution Overview
Problem
Conventional magnetic tunnel junction (MTJ) devices face challenges in maintaining low contact resistance while avoiding short circuits due to the proximity of metal interconnections to magnetic tunnel junction elements.
Innovation Solution
The design includes a metal interconnection with a long shape at a top view, positioned between two magnetic tunnel junction elements, where the contact plug part has a length greater than its width in an orthogonal direction, or is stacked from bottom to top, ensuring a minimum distance of at least 1/5 of the metal part's length to prevent short circuits while maintaining a sufficient surface area for low contact resistance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If the metal interconnection is positioned close to the magnetic tunnel junction elements, then the contact area is maintained, but short circuit risk increases
Solution Approach 1:
The contact plug part is designed with an asymmetric long shape where the length in the second direction (orthogonal to the first direction) is greater than the width in the first direction. This asymmetric geometry allows the contact area to be maintained while the extended dimension provides increased spacing from adjacent magnetic tunnel junction elements, thereby reducing short circuit risk.
Solution Approach 2:
Instead of increasing the contact area by expanding in the first direction (which would reduce distance to adjacent elements), the invention extends the contact plug part in the second direction (orthogonal dimension). This dimensional shift allows simultaneous achievement of adequate contact area and sufficient spacing from neighboring structures.
2Reliability
If the distance between metal interconnection and magnetic tunnel junction elements is increased, then short circuit is avoided, but contact area decreases
Solution Approach 1:
The contact plug part employs an asymmetric long shape configuration where the length in the second direction exceeds the width in the first direction. This asymmetric design enables the contact area to be maintained through the extended length while the geometry inherently provides increased distance from adjacent magnetic tunnel junction elements, avoiding short circuits.
Solution Approach 2:
The invention resolves the contradiction by extending the contact plug part in the second direction (orthogonal to the first direction) rather than expanding in the first direction. This dimensional change allows the contact area to be preserved while achieving increased spacing from neighboring magnetic tunnel junction elements, thereby avoiding short circuits.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration effectively increases the distance between the metal interconnection and the magnetic tunnel junction elements to prevent short circuits while preserving low contact resistance, enhancing the reliability and performance of the MTJ device.
Implementation Method 1
The resistance of the magnetic tunnel junction (MTJ) unit can be adjusted by changing a direction of a magnetic moment of the free magnetic layer with respect to that of the fixed magnetic layer
Implementation Method 2
the contact plug part has a long shape at a top view, and the long shape has a length at a second direction larger than a width at the first direction
Data Source
AI summary
A magnetic tunnel junction (MTJ) device includes two magnetic tunnel junction elements and a metal interconnection. The two magnetic tunnel junction elements are arranged side by side at a first direction. The metal interconnection is disposed between the magnetic tunnel junction elements, wherein the metal interconnection includes a contact plug part having a long shape at a top view, and the long shape has a length at a second direction larger than a width at the first direction, wherein the second direction is orthogonal to the first direction.