MTJ Device Trench Structure for MRAM Density and Power

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Solution Overview

Problem

Current Magnetoresistive Random Access Memory (MRAM) technologies, specifically Magnetic Tunnel Junction (MTJ) devices, face challenges in achieving improved performance characteristics such as density, power consumption, and speed comparable to other memory technologies like DRAM, flash memory, and SRAM.

Innovation Solution

The design involves a Magnetic Tunnel Junction (MTJ) device structure with a reference magnetic layer, tunnel barrier layer, free magnetic layer, and conductive layer, arranged in trenches with insulator blocks, allowing for efficient data storage and retrieval by switching the magnetic polarization based on current direction, and includes a method of manufacturing that forms these layers and insulator blocks to enhance performance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If conventional MTJ device structures are used, then manufacturing simplicity is maintained, but data storage density and performance characteristics cannot compete with DRAM, flash memory, and SRAM

Engineering Contradiction:
Improvedata storage densityVSAvoiddevice structure complexity
Core Design Contradiction:
Quantity of substanceVSDevice complexity

Solution Approach 1:

The patent divides the MTJ device into segmented components including multiple magnetic layers (reference magnetic layer, free magnetic layer), tunnel barrier layers, conductive layers, and insulator blocks arranged in trenches. This segmentation enables higher data storage density by creating distinct storage units while maintaining manageable manufacturing processes through modular assembly

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent transitions from planar MTJ structures to three-dimensional configurations by forming trenches and stacking multiple layers vertically. This dimensional change increases data storage density by utilizing vertical space, allowing multiple storage elements to be stacked in the same footprint area

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Use of energy by moving object

If conventional MRAM structures are used, then manufacturing processes remain simple, but power consumption and speed do not match other memory technologies

Engineering Contradiction:
Improvepower consumptionVSAvoidMTJ cell structure
Core Design Contradiction:
Use of energy by moving objectVSDevice complexity

Solution Approach 1:

The patent applies local quality by creating distinct regions with specific properties: insulator blocks provide electrical isolation in specific locations, while conductive layers provide current pathways in targeted areas. This localized optimization reduces power consumption by minimizing leakage current while maintaining the magnetic switching functionality needed for fast operation

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent introduces insulator blocks as intermediary elements between adjacent MTJ cells and conductive layers. These insulator blocks mediate the electrical interactions, preventing unwanted current leakage while allowing controlled current flow through the magnetic layers, thereby reducing power consumption without complicating the core magnetic switching mechanism

Inventive Principle:
Principle #24Intermediary (Mediator)

3Speed

If conventional MTJ devices are used, then manufacturing is straightforward, but speed and performance characteristics fall short of DRAM, flash memory, and SRAM

Engineering Contradiction:
Improvememory access speedVSAvoidlayered structure with trenches
Core Design Contradiction:
SpeedVSDevice complexity

Solution Approach 1:

The patent employs preliminary action by pre-forming the reference magnetic layer and establishing the trench structure before depositing subsequent layers. This sequential preparation ensures proper alignment and magnetic orientation are established early in the manufacturing process, enabling faster device operation while maintaining manufacturing efficiency through a structured fabrication sequence

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enhances the performance of MRAM devices by improving data storage density, reducing power consumption, and increasing speed, making them more competitive with other memory technologies.

Implementation Method 1

Magnetoresistive Random Access Memory (MRAM)... data can be stored in the magnetization orientation between ferromagnetic layers of a Magnetic Tunnel Junction (MTJ)

Methodology Applied
Scientific EffectMagnetoresistance: Magnetoresistance

Implementation Method 2

magnetic tunnel barrier layer... One or more sections of a tunnel barrier layer can be disposed on the walls of the plurality of trenches

Methodology Applied
Scientific EffectTunneling:

Implementation Method 3

the polarization of the magnetization of the other magnetic layer 120 can switch between opposite directions

Methodology Applied
Scientific EffectMagnetization switching:

Implementation Method 4

free magnetic layer... One or more sections of a free magnetic layer can be disposed on the one or more sections of the tunnel barrier layer

Methodology Applied
Scientific EffectFerromagnetism: Ferromagnetism

Implementation Method 5

One of the magnetic layers 110 can have a fixed magnetization polarization 140... reference magnetic layer

Methodology Applied
Scientific EffectMagnetic field: Magnetic Field

Data Source

PatentUS11107978B2Methods of manufacturing three-dimensional arrays with MTJ devices including a free magnetic trench layer and a planar reference magnetic layer
Publication Date: 2021.08.31 INTEGRATED SILICON SOLUTION CAYMAN INC
  • US11107978B2 patent drawing
  • US11107978B2 patent drawing
  • US11107978B2 patent drawing

AI summary

A Magnetic Tunnel Junction (MTJ) device can include a reference magnetic layer having one or more trenches disposed therein. One or more sections of a tunnel barrier layer can be disposed on the walls of the one or more trenches. One or more sections of a free magnetic layer can be disposed on the one or more sections of the tunnel barrier layer in the one or more trenches. One or more sections of a conductive layer can be disposed on the one or more sections of the free magnetic layer in the one or more trenches. One or more insulator blocks can be disposed between corresponding sections of the tunnel barrier layer, corresponding sections of the free magnetic layer and corresponding sections of the conductive layer in the one or more trenches.