MTJ Devices with Trench Reference Layers for MRAM Density

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Current Magnetoresistive Random Access Memory (MRAM) technologies, specifically Magnetic Tunnel Junction (MTJ) devices, face challenges in achieving improved performance characteristics such as density, power consumption, and speed comparable to other memory technologies like DRAM, flash memory, and SRAM.

Innovation Solution

The design involves a Magnetic Tunnel Junction (MTJ) device structure with a reference magnetic layer, tunnel barrier layer, free magnetic layer, and conductive layer, arranged in trenches with insulator blocks, allowing for efficient data storage and retrieval by switching the magnetic polarization based on current direction, and manufacturing methods that include forming planar magnetic layers and depositing tunnel insulator and free magnetic layers within these trenches.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If conventional MTJ device structures are used, then manufacturing simplicity is maintained, but manufacturing precision and device performance are insufficient

Engineering Contradiction:
Improvedevice performanceVSAvoidstructure complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The reference magnetic layer is segmented into multiple sections separated by trenches, with insulator blocks positioned between adjacent MTJ cells. This segmentation isolates magnetic fields between cells, preventing interference and improving manufacturing precision of individual devices while maintaining overall structure manageability.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent applies different structural configurations to different regions: planar reference magnetic layers in some areas and patterned reference magnetic layers with trenches in others. This allows optimization of local device performance through precise control of magnetic field distribution and tunnel barrier formation in specific regions.

Inventive Principle:
Principle #3Local quality

2Quantity of substance

If higher density is achieved through advanced MTJ structures, then storage capacity increases, but manufacturing complexity increases

Engineering Contradiction:
Improvestorage densityVSAvoidmanufacturing complexity
Core Design Contradiction:
Quantity of substanceVSEase of manufacture

Solution Approach 1:

The patent transitions from two-dimensional planar MTJ structures to three-dimensional structures by forming trenches through the reference magnetic layer and positioning insulator blocks within these trenches. This vertical dimensionality increase enables higher storage density by allowing multiple MTJ cells to be stacked or closely packed while maintaining manufacturing feasibility through standardized trench formation processes.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Reliability

If magnetic field isolation is improved between adjacent cells, then data storage reliability increases, but device structure complexity increases

Engineering Contradiction:
Improvedata storage reliabilityVSAvoidstructural complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

Insulator blocks are introduced as intermediary elements positioned between adjacent MTJ cells within the trenches. These insulator blocks act as magnetic field barriers, isolating the magnetic fields of neighboring cells to prevent cross-talk and improve data storage reliability, while their regular geometric shape keeps the added structural complexity manageable.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enhances the performance of MRAM devices by maintaining non-volatile data storage while improving density, power efficiency, and operational speed, making them more competitive with other memory technologies.

Implementation Method 1

Magnetic Tunnel Junction (MTJ) device structure with a reference magnetic layer, tunnel barrier layer, free magnetic layer

Methodology Applied
Scientific EffectMagnetic tunneling: Magnetoresistance

Implementation Method 2

the polarization of the magnetization of the other magnetic layer can switch between opposite directions

Methodology Applied
Scientific EffectMagnetization switching: Magnetic Field

Implementation Method 3

if the magnetic layers have the same magnetization polarization, the MTJ cell will exhibit a relatively low resistance value; while if the magnetization polarization between the two magnetic layers is antiparallel the MTJ cell will exhibit a relatively high resistance value

Methodology Applied
Scientific EffectMagnetoresistive effect: Magnetoresistance

Data Source

PatentUS10784437B2Three-dimensional arrays with MTJ devices including a free magnetic trench layer and a planar reference magnetic layer
Publication Date: 2020.09.22 INTEGRATED SILICON SOLUTION CAYMAN INC
  • US10784437B2 patent drawing
  • US10784437B2 patent drawing
  • US10784437B2 patent drawing

AI summary

A Magnetic Tunnel Junction (MTJ) device can include a reference magnetic layer having one or more trenches disposed therein. One or more sections of a tunnel barrier layer can be disposed on the walls of the one or more trenches. One or more sections of a free magnetic layer can be disposed on the one or more sections of the tunnel barrier layer in the one or more trenches. One or more sections of a conductive layer can be disposed on the one or more sections of the free magnetic layer in the one or more trenches. One or more insulator blocks can be disposed between corresponding sections of the tunnel barrier layer, corresponding sections of the free magnetic layer and corresponding sections of the conductive layer in the one or more trenches.