MTP Memory Cell With Shared Junction Gates

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Solution Overview

Problem

Existing non-volatile multi-time programmable (MTP) memories face challenges with long operation times, small coupling ratios, large cell sizes, and the need for different voltage values at various terminals, which complicates their integration and increases processing steps, especially when trying to be compatible with the standard CMOS platform.

Innovation Solution

A non-volatile MTP memory cell structure is developed, comprising a substrate with a transistor well, control and erase capacitor wells, and control and erase gates, where the control and erase gates share a common junction configuration, allowing for simplified voltage requirements and reduced terminal voltages, and a method for forming this cell that involves specific doping and well configurations to enhance performance and compatibility with CMOS technology.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Duration of action of moving object

If conventional MTP memory structures are used, then non-volatile storage functionality is achieved, but operation time per cycle becomes long

Engineering Contradiction:
Improveoperation time per cycleVSAvoidprogramming/erasing speed
Core Design Contradiction:
Duration of action of moving objectVSProductivity

Solution Approach 1:

The memory cell is segmented into distinct functional regions: a transistor well for charge storage, a control well for programming operations, and an erase well for erasure operations. This segmentation allows independent optimization of each region's function, enabling faster programming and erasing speeds while maintaining non-volatile storage capability.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Capacitor structures are introduced as intermediary elements between the transistor well and the control/erase gates. These capacitors enhance the coupling ratio and enable more efficient charge transfer during programming and erasing operations, thereby reducing operation time per cycle without sacrificing storage functionality.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Quantity of substance

If conventional MTP memory structures are used, then non-volatile storage functionality is achieved, but cell size becomes large

Engineering Contradiction:
Improvestorage capacity per unit areaVSAvoidcell size
Core Design Contradiction:
Quantity of substanceVSArea of stationary object

Solution Approach 1:

The control well and erase well are nested within or adjacent to the transistor well structure, with capacitor structures integrated into the same vertical space. This nested configuration allows multiple functional elements to share overlapping spatial regions, significantly reducing the overall cell footprint while maintaining adequate storage capacity.

Inventive Principle:
Principle #7Nested doll (Nesting)

Solution Approach 2:

The patent utilizes vertical stacking of wells and gates in the third dimension rather than spreading all components horizontally. The transistor well, control well, and erase well are arranged in a vertical configuration with corresponding gates stacked above them, transforming a planar layout into a three-dimensional structure that increases storage density without expanding cell area.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Adaptability or versatility

If conventional MTP memory structures are used, then non-volatile storage functionality is achieved, but different voltage values are required at various terminals

Engineering Contradiction:
Improveoperational flexibilityVSAvoidvoltage requirement complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The control gate and erase gate share a common junction configuration and can be controlled by a unified voltage signaling scheme. The capacitor-coupled architecture allows the same control terminal to perform both programming and erasing functions by applying different voltage levels, eliminating the need for separate voltage supplies for different operations and simplifying the overall voltage requirement structure.

Inventive Principle:
Principle #6Universality (Multi-functionality)

4Reliability

If conventional MTP memory structures are used, then non-volatile storage functionality is achieved, but coupling ratio becomes small

Engineering Contradiction:
Improvecharge retentionVSAvoidcapacitor coupling structure
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

Capacitor structures are positioned as intermediary elements between the transistor well and the control/erase gates. These capacitors provide strong electrical coupling that enhances charge transfer efficiency during programming and erasing operations, thereby improving the coupling ratio and charge retention reliability.

Inventive Principle:
Principle #24Intermediary (Mediator)

5Reliability

If conventional MTP memory structures are used, then non-volatile storage functionality is achieved, but additional processing steps are required

Engineering Contradiction:
Improvememory functionalityVSAvoidprocessing steps
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The control well and erase well fabrication processes are merged into a single processing sequence, with both wells formed using the same doping and patterning steps. The capacitor structures for both wells are created simultaneously, and the control and erase gates are formed in a unified process flow, thereby reducing the total number of additional processing steps required compared to conventional separate well structures.

Inventive Principle:
Principle #5Merging (Combining)

Data Source

PatentUS10090311B1Cost-free MTP memory structure with reduced terminal voltages
Publication Date: 2018.10.02 GLOBALFOUNDRIES SINGAPORE PTE LTD
  • US10090311B1 patent drawing
  • US10090311B1 patent drawing
  • US10090311B1 patent drawing

AI summary

Device and methods for forming a single transistor non-volatile (NV) multi-time programmable (MTP) memory cell are disclosed. The disclosed memory cell is derived via the disclosed method that includes providing a substrate and forming at least a transistor well with a second polarity type dopant and first and second capacitor wells with a first polarity type dopant in the substrate. The method also includes forming a transistor having a floating gate over the transistor well, a control gate over the first capacitor well and coupled to the floating gate, an erase gate over the second capacitor well and coupled to the floating gate. The control gate comprises a control capacitor while the erase gate comprises an erase capacitor that is decoupled from the control capacitor.