μLED Backplane Bonding With Pulsed Laser Thermal Control

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Solution Overview

Problem

Conventional methods for bonding millions of light-emitting diodes (LEDs) to backplanes in display devices result in adverse thermal effects, increasing manufacturing costs and time, and decreasing yield due to thermal expansion mismatches between LEDs and backplanes.

Innovation Solution

A method involving the use of pulsed laser technology to selectively bond LEDs to a target substrate, where the temporal and spatial profiles of photon pulses are modulated to control thermal effects, allowing for precise and efficient electrical coupling while minimizing thermal impact on the LEDs and backplane.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional bonding methods are used to bond LEDs to backplanes, then bonding can be achieved, but adverse thermal effects occur due to thermal expansion mismatches

Engineering Contradiction:
Improvebonding reliabilityVSAvoidthermal effects
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The patent introduces a multi-stage curing process with controlled temperature parameters. The underfill material is first cured at a low temperature (e.g., 50-100°C) to establish mechanical support, then subsequently cured at a higher temperature (e.g., 150-200°C) to achieve full bonding. This staged parameter change allows bonding to proceed while minimizing thermal expansion mismatches that would occur with conventional single-stage high-temperature bonding.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The underfill material is applied and partially cured before the actual LED-to-backplane bonding process. This preliminary action creates a mechanical support structure that stabilizes the assembly during subsequent bonding operations, preventing thermal expansion mismatches from causing misalignment or bonding failures.

Inventive Principle:
Principle #10Preliminary action

2Reliability

If conventional bonding methods are used, then LEDs can be bonded to backplanes, but manufacturing time and cost increase

Engineering Contradiction:
Improvebonding reliabilityVSAvoidmanufacturing time
Core Design Contradiction:
ReliabilityVSLoss of time

Solution Approach 1:

The underfill material is pre-applied to either the backplane or LED array before the bonding process. This preliminary action eliminates the need for separate underfill application steps during manufacturing, reducing overall process time while ensuring proper positioning and support during bonding.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The multi-stage curing process allows different portions of the assembly to be cured at different times and temperatures. The first stage provides immediate mechanical support at low temperature, while the second stage completes bonding. This parameter optimization reduces total manufacturing time compared to conventional single-stage high-temperature bonding that requires longer processing to avoid defects.

Inventive Principle:
Principle #35Parameter changes

3Productivity

If conventional bonding methods are used, then LEDs can be bonded to backplanes, but yield decreases due to thermal expansion mismatches

Engineering Contradiction:
Improvemanufacturing yieldVSAvoidthermal expansion mismatches
Core Design Contradiction:
ProductivityVSObject-affected harmful factors

Solution Approach 1:

The staged curing process with controlled temperature parameters minimizes thermal expansion mismatches. The first curing stage at low temperature (50-100°C) establishes mechanical support with minimal thermal stress, while the second stage at higher temperature (150-200°C) completes bonding. This parameter optimization significantly reduces bonding defects and improves manufacturing yield.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The underfill material is pre-applied and partially cured to create a stable mechanical support structure before final bonding. This preliminary action prevents thermal expansion mismatches from causing misalignment or bonding failures during the heating process, thereby improving yield.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach reduces adverse thermal effects, ensures accurate alignment and bonding of LEDs, and enhances the mechanical and electrical integrity of the bonds, thereby improving manufacturing efficiency and reducing defects in display devices.

Implementation Method 1

applying first thermal energy to the uncured UF material to pre-cure the uncured UF material

Methodology Applied
Scientific EffectThermal energy: Heating

Implementation Method 2

irradiating an excess portion of the pre-cured UF material with a first photon beam to remove the excess portion

Methodology Applied
Scientific EffectLaser ablation: Laser Ablation

Implementation Method 3

bonding the at least partially exposed distal portion of the second electrical contact to the adjacent distal portion of the first electrical contact is induced by second thermal energy generated by a second photon beam irradiating at least one of the semiconductor device or the target substrate

Methodology Applied
Scientific EffectLaser-induced heating: Heating

Implementation Method 4

curing the pre-cured UF material

Methodology Applied
Scientific EffectPhotopolymerization: Photopolymerisation

Data Source

PatentEP3935664B1Method for coupling a semiconductor device to a target substrate and system for performing said method
Publication Date: 2024.12.04 META PLATFORMS TECHNOLOGIES LLC
  • EP3935664B1 patent drawingFigure 1A~1B
  • EP3935664B1 patent drawingFigure 2A
  • EP3935664B1 patent drawingFigure 2B

AI summary

The invention is directed towards enhanced systems and methods for employing a pulsed photon (or EM energy) source, such as but not limited to a laser, to electrically couple, bond, and/or affix the electrical contacts of a semiconductor device to the electrical contacts of another semiconductor devices. Full or partial rows of LEDs are electrically coupled, bonded, and/or affixed to a backplane of a display device. The LEDs may be μLEDs. The pulsed photon source is employed to irradiate the LEDs with scanning photon pulses. The EM radiation is absorbed by either the surfaces, bulk, substrate, the electrical contacts of the LED, and/or electrical contacts of the backplane to generate thermal energy that induces the bonding between the electrical contacts of the LEDs' electrical contacts and backplane's electrical contacts. The temporal and spatial profiles of the photon pulses, as well as a pulsing frequency and a scanning frequency of the photon source, are selected to control for adverse thermal effects.