Multi-Angle X-Ray Inspection for One-Shot 3D Imaging

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Solution Overview

Problem

Existing 3D X-ray imaging devices are inefficient in terms of image data acquisition speed, which hinders faster inspection processes for complex objects.

Innovation Solution

An X-ray inspection system that generates multiple separate X-ray light bundles with different chief ray illumination angles, allowing simultaneous illumination of a region of interest, thereby enabling 'one shot' 3D X-ray imaging and increasing X-ray throughput.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If multiple separate X-ray light bundles with different chief ray illumination angles are generated to illuminate the ROI simultaneously, then image data acquisition speed is improved and X-ray throughput is increased, but device complexity increases

Engineering Contradiction:
Improveimage data acquisition speedVSAvoidX-ray source complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The X-ray source is segmented into multiple independent X-ray light bundles, each with its own chief ray illumination angle. This segmentation allows simultaneous illumination of the ROI from multiple angles, enabling faster 3D image acquisition without requiring sequential scanning, thus resolving the contradiction between acquisition speed and device complexity by dividing the imaging function into parallel independent channels.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent introduces angular dimensionality by generating X-ray light bundles with different chief ray illumination angles. Instead of acquiring 3D information through temporal sequencing or object rotation, the system captures multiple projection angles simultaneously by adding the angular dimension to the X-ray illumination, thereby improving productivity while managing device complexity through geometric optimization.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Productivity

If multiple separate X-ray light bundles are used to enable one shot 3D imaging, then inspection speed is enhanced, but the number of required detection areas increases

Engineering Contradiction:
Improveinspection speedVSAvoiddetection system area
Core Design Contradiction:
ProductivityVSArea of stationary object

Solution Approach 1:

Multiple detection areas are merged into a single integrated detection system that simultaneously receives X-ray light bundles from different angles. By combining the detection functions and using shared signal processing resources, the system achieves fast inspection speed without requiring proportional increases in physical detection area, thus resolving the contradiction between inspection speed and detection system footprint.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The detection system is designed with multi-functionality, where the detection areas and associated processing electronics serve multiple purposes: detecting X-rays from different illumination angles, capturing projection data for 3D reconstruction, and potentially performing quality control functions. This universal design enables enhanced inspection speed without linearly increasing the detection area required.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach allows for faster image data acquisition, reduces the need for extensive object rotation, and enhances the inspection speed of complex objects like multi-chip modules and semiconductor packages.

Implementation Method 1

an X-ray source for generating X-rays to propagate through a region of interest of the object

Methodology Applied
Scientific EffectX-ray generation: X-Ray

Implementation Method 2

a detection system to detect the X-rays after propagation through the ROI

Methodology Applied
Scientific EffectX-ray detection: Photoelectric Effect

Data Source

PatentUS20250146958A1X-ray inspection system for inspection of an object
Publication Date: 2025.05.08 CARL ZEISS SMT GMBH
  • US20250146958A1 patent drawing
  • US20250146958A1 patent drawing
  • US20250146958A1 patent drawing

AI summary

An X-ray inspection system serves for inspection of an object. An X-ray source of the system generates X-rays to propagate through a region of interest of the object. An object mount holds the object to be inspected such that the ROI is accessible for the generated X-rays. A detection system detects the X-rays after propagation through the ROI. The X-ray source generates a plurality of separate X-ray light bundles to propagate through the ROI. Chief rays of at least two of the generated separate X-ray light bundles impinge on the ROI of the object with different chief ray illumination angles. The detection system comprises separate detection areas to detect the separate X-ray light bundles, respectively. Such an inspection system can exhibit relatively fast image data acquisition.