Multi-Arm Substrate Transfer Unit for Precise Positioning
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Solution Overview
Problem
Existing substrate transfer systems face challenges in accurately positioning multiple substrates simultaneously and efficiently transferring them between containers due to differences in teaching positions of transfer hands, leading to misalignment and inefficiencies.
Innovation Solution
The apparatus employs a transfer unit with vertically arranged arms and hands, including a first arm with multiple hands and a second arm with a single hand, along with a lower transfer unit, all controlled by a controller to manage the transfer of substrates. This setup allows for simultaneous transfer of multiple substrates to the right position by optimizing hand spacing and arm movement, ensuring accurate alignment and efficient transfer.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If each hand has a different teaching position, then the transfer unit can accommodate different hand configurations, but the substrate cannot be transferred to the correct position simultaneously when transferring multiple substrates
Solution Approach 1:
The transfer unit is divided into multiple independent arms (first arm, second arm, third arm, fourth arm), each capable of independent movement and positioning. Each arm can be controlled separately to achieve precise positioning of multiple substrates simultaneously, resolving the conflict between having different hand configurations and maintaining positioning accuracy.
Solution Approach 2:
The arms are designed to be movable rather than fixed, allowing dynamic adjustment of hand positions. The first and second arms can move independently along the first direction, as can the third and fourth arms, enabling real-time positioning adjustments to accommodate different substrate transfer requirements while maintaining accuracy.
2Productivity
If multiple substrates are transferred simultaneously, then transfer efficiency is improved, but positioning accuracy deteriorates due to differences in teaching positions
Solution Approach 1:
The transfer system uses multiple independent arms that can operate simultaneously but independently. This segmentation allows each arm to be precisely controlled to its specific teaching position, enabling multiple substrates to be transferred at the same time without compromising positioning accuracy, thus resolving the contradiction between efficiency and precision.
Solution Approach 2:
Each arm is designed with multi-functionality, capable of transferring substrates to different positions while maintaining the same level of precision. The arms can adapt to different transfer scenarios (single substrate or multiple substrates) while consistently achieving accurate positioning, allowing simultaneous transfer without accuracy loss.
3Manufacturing precision
If a single arm transfers multiple substrates sequentially, then positioning accuracy is maintained, but transfer time increases
Solution Approach 1:
The transfer function is segmented across multiple arms that can operate in parallel. Instead of one arm sequentially transferring multiple substrates, multiple arms can simultaneously transfer multiple substrates to different positions, maintaining precision while dramatically reducing total transfer time.
Solution Approach 2:
Multiple arms operate continuously and simultaneously to transfer substrates, eliminating the idle time that occurs when a single arm must complete one transfer before starting the next. This parallel operation maintains continuous useful action across the entire transfer system, reducing overall transfer time while preserving accuracy.
Data Source
AI summary
An apparatus for treating a substrate, an apparatus for transferring a substrate and a method for transferring a substrate are provided. The substrate treating apparatus comprises a receiving unit having a plurality of vertically arranged substrate supporting members and a transferring unit having an upper transfer member transferring a substrate to the receiving unit. The upper transfer member comprises a first arm and a second that are vertically spaced apart from each other and are independently driven to extend horizontally. A plurality of vertically arranged first hands is connected to the first arm and a single hand is connected to the second arm. According to an embodiment, a plurality of substrates can be transferred to a right position.