Multi-Axis MEMS Actuator Assembly for Compact Camera Motion

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Solution Overview

Problem

Current miniaturized actuators for camera packages face challenges in providing compact, low-power, and cost-effective solutions for multi-axis movement within the constraints of portable devices, imaging devices, and medical instruments.

Innovation Solution

A multi-axis MEMS assembly incorporating an in-plane MEMS actuator with an electromagnetic actuator portion and an out-of-plane MEMS actuator, utilizing magnetic assemblies for displacement and piezoelectric actuation to enable linear and rotational movements, coupled with an optoelectronic device for image stabilization and autofocus functions.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Volume of moving object

If conventional actuators are used for multi-axis movement in camera packages, then adequate movement capability is achieved, but the device size and power consumption increase

Engineering Contradiction:
Improveactuator sizeVSAvoidpower consumption
Core Design Contradiction:
Volume of moving objectVSPower

Solution Approach 1:

The patent combines multiple actuation mechanisms (electromagnetic actuator portion with magnetic assemblies, piezoelectric actuator portions) into a single integrated MEMS actuator structure that provides multi-axis movement capabilities. This merging allows the system to achieve adequate movement capability while reducing overall device size and power consumption compared to using separate conventional actuators for each axis.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent replaces conventional mechanical actuators with MEMS-based actuation mechanisms including electromagnetic actuators with magnetic assemblies and piezoelectric actuators. This substitution enables miniaturization of the actuator system while maintaining multi-axis movement capability, directly addressing the contradiction between adequate movement and reduced size/power consumption.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Volume of moving object

If miniaturized MEMS actuators are used to reduce size, then compactness is achieved, but providing adequate multi-axis movement capability becomes challenging

Engineering Contradiction:
Improveactuator sizeVSAvoidmulti-axis movement capability
Core Design Contradiction:
Volume of moving objectVSAdaptability or versatility

Solution Approach 1:

The patent designs the MEMS actuator as a multi-functional device that can provide movement along multiple axes (X, Y, and Z axes) and perform different functions (image stabilization, autofocus) within a single compact structure. The in-plane MEMS actuator handles in-plane movements while the out-of-plane MEMS actuator handles depth adjustments, enabling the miniaturized actuator to achieve adequate multi-axis movement capability through universal design.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent segments the MEMS actuator into distinct functional portions: an in-plane MEMS actuator for lateral movements and an out-of-plane MEMS actuator for depth movements. Each segment is optimized for specific movement directions, allowing the overall compact structure to achieve comprehensive multi-axis movement capability through coordinated operation of segmented components.

Inventive Principle:
Principle #1Segmentation

3Manufacturing precision

If multiple separate actuators are used for different axes, then movement precision is maintained, but device complexity and cost increase

Engineering Contradiction:
Improvemovement precisionVSAvoidactuator structure complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent merges multiple actuation functions into a single integrated MEMS actuator structure with coordinated in-plane and out-of-plane portions. This integration maintains movement precision through precise control of each segment while reducing device complexity and cost compared to using multiple separate actuators, as the segments share common structural elements and control mechanisms.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution provides efficient, compact, and low-power multi-axis movement capabilities, enhancing image stabilization and autofocus performance while meeting the size and cost constraints of camera packages.

Implementation Method 1

the in-plane MEMS actuator includes an electromagnetic actuator portion

Methodology Applied
Scientific EffectElectromagnetic actuation: Electromagnetic Induction

Implementation Method 2

The at least one magnetic assembly may be configured to enable in-plane displacement of the optoelectronic device

Methodology Applied
Scientific EffectMagnetic force: Magnetic Field

Data Source

PatentUS12003195B2MEMS actuation system
Publication Date: 2024.06.04 MEMS DRIVE (NANJING) CO LTD
  • US12003195B2 patent drawing
  • US12003195B2 patent drawing
  • US12003195B2 patent drawing

AI summary

A multi-axis MEMS assembly includes: a micro-electrical-mechanical system (MEMS) actuator configured to provide linear three-axis movement, the micro-electrical-mechanical system (MEMS) actuator including: an in-plane MEMS actuator, and an out-of-plane MEMS actuator; and an optoelectronic device coupled to the micro-electrical-mechanical system (MEMS) actuator; wherein the in-plane MEMS actuator includes an electromagnetic actuator portion.