Spatial Light Modulator Coating for Multi-Band Laser Processing

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Solution Overview

Problem

Existing laser processing devices are limited to a single wavelength band, making them inflexible for processing objects with varying specifications and conditions.

Innovation Solution

A laser processing device equipped with a spatial light modulator featuring a dielectric multilayer film with high reflectance in multiple non-contiguous wavelength bands, allowing modulation of laser light to adapt to different wavelength ranges, and includes distortion correction patterns and tables associating luminance values with phase modulation amounts for each band.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If a single wavelength band is used for laser processing, then the device structure is simple, but the adaptability to different processing specifications is poor

Engineering Contradiction:
Improveadaptability to different wavelength bandsVSAvoidstructure of spatial light modulator
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The dielectric multilayer film on the reflective surface is designed with multiple high reflectance regions corresponding to different wavelength bands (e.g., 500-550nm, 1000-1150nm, 1300-1400nm). This allows the spatial light modulator to handle multiple wavelength bands without requiring separate devices, achieving multi-functionality and improving adaptability to different processing specifications.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The reflective surface uses a dielectric multilayer film composed of multiple layers with different optical properties. This composite structure enables the film to exhibit high reflectance across multiple non-contiguous wavelength bands simultaneously, resolving the contradiction between maintaining simple device structure and achieving broad wavelength adaptability.

Inventive Principle:
Principle #40Composite materials

2Manufacturing precision

If a standard reflective surface is used, then the manufacturing is simple, but the wavefront distortion cannot be corrected for different wavelengths

Engineering Contradiction:
Improvewavefront distortion correctionVSAvoidmanufacturing of distortion correction patterns
Core Design Contradiction:
Manufacturing precisionVSEase of manufacture

Solution Approach 1:

Different distortion correction patterns are applied for different wavelength bands based on the specific flatness characteristics of the reflective surface at each wavelength. The pattern holding unit stores multiple correction patterns corresponding to different wavelength bands, allowing the system to select and apply the appropriate correction pattern for the current processing wavelength, thereby achieving high manufacturing precision without overcomplicating the manufacturing process.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

Distortion correction patterns for different wavelength bands are pre-calculated and stored in the pattern holding unit before actual processing. This preliminary preparation allows the system to quickly switch between correction patterns without real-time computation, maintaining ease of manufacture while achieving precise wavefront correction for each wavelength band.

Inventive Principle:
Principle #10Preliminary action

3Measurement precision

If a single phase modulation table is used, then the control is simple, but the phase modulation accuracy varies across different wavelength bands

Engineering Contradiction:
Improvephase modulation accuracyVSAvoidcontrol tables for different bands
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The table holding unit stores multiple phase modulation tables, each optimized for a specific wavelength band. When processing a particular wavelength, the system selects and uses the corresponding table from the set. This approach maintains high phase modulation accuracy for each wavelength band by using wavelength-specific parameters, while the overall control complexity is managed through automated table selection based on the current processing wavelength.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The device can effectively process objects using laser light across multiple wavelength bands, ensuring adaptability and reducing light loss, thereby enhancing processing versatility and reproducibility.

Implementation Method 1

a dielectric multilayer film having a high reflectance region in a plurality of wavelength bands non-contiguous with each other is formed on the reflective surface

Methodology Applied
Scientific EffectReflection: Reflection

Implementation Method 2

a dielectric multilayer film having a high reflectance region in a plurality of wavelength bands non-contiguous with each other is formed on the reflective surface

Methodology Applied
Scientific EffectDielectric multilayer film interference: Interference

Implementation Method 3

a modulation layer arranged between the entrance surface and the reflective surface and configured to display the phase pattern to modulate the laser light

Methodology Applied
Scientific EffectPhase modulation: Phase Modulation

Data Source

PatentUS12383984B2Laser processing device
Publication Date: 2025.08.12 HAMAMATSU PHOTONICS KK
  • US12383984B2 patent drawing
  • US12383984B2 patent drawing
  • US12383984B2 patent drawing

AI summary

A laser processing device configured to emit laser light on an object to perform laser processing of the object, the laser processing device including: a laser output unit configured to output the laser light; a spatial light modulator configured to reflect the laser light output from the laser output unit while modulating the laser light in accordance with a phase pattern; and an objective lens configured to converge the laser light from the spatial light modulator toward the object, in which the spatial light modulator includes an entrance surface, a reflective surface, and a modulation layer configured to display the phase pattern to modulate the laser light, and a dielectric multilayer film having a high reflectance region in a plurality of wavelength bands non-contiguous with each other is formed on the reflective surface.