Multi-beam Blanking Device with Segmented Electrode Control
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Solution Overview
Problem
In multi-beam writing apparatuses, the existing blanking control systems face challenges in achieving high-speed and high-precision beam control due to space and current restrictions on the blanking plate, leading to increased crosstalk and reduced writing precision when trying to control multiple beams independently.
Innovation Solution
A blanking device with individual blanking mechanisms for each beam and a common blanking mechanism with electrode groups, where the array pitch of the electrode groups is smaller than or equal to the beam pitch, allowing for collective deflection of multi-beams to control exposure time, thereby improving speed and precision.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a blanking control circuit for each beam is placed on a blanking plate, then individual beam control is achieved, but the circuit space and current consumption are restricted, preventing high-speed and high-precision operation
Solution Approach 1:
The patent divides the blanking control function into two segments: individual blanking electrodes for each beam and a common blanking electrode shared by all beams. This segmentation allows the complex control circuitry to be distributed, with simple individual controls on the blanking plate and more sophisticated common control outside the plate, resolving the contradiction between precision and complexity.
Solution Approach 2:
The common blanking electrode serves multiple beams simultaneously, providing a universal control mechanism. This multi-functionality reduces the overall circuit complexity on the blanking plate while maintaining the ability to perform high-speed and high-precision blanking control for all beams through the shared electrode.
2Device complexity
If control circuits for each beam are placed outside the blanking plate and connected by wiring, then circuit space is secured, but wiring length increases causing increased crosstalk and degraded writing precision
Solution Approach 1:
The control system is segmented into individual beam control circuits placed outside the blanking plate and a common blanking control circuit. This segmentation allows complex circuits to be positioned away from the sensitive blanking plate area, reducing crosstalk while maintaining precision through the coordinated operation of individual and common electrodes.
3Productivity
If the pitch of multi-beams is narrowed to increase throughput, then more beams can be emitted, but space for placing blanking circuits is further restricted
Solution Approach 1:
The patent merges the blanking control function for multiple beams into a shared common blanking electrode system. This consolidation reduces the total area required on the blanking plate compared to having separate circuits for each beam, thereby enabling narrower beam pitch and higher throughput while maintaining adequate control capability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables high-speed and precise control of multi-beams, reducing crosstalk and improving writing precision while maintaining the compactness and efficiency of the control circuitry.
Implementation Method 1
a plurality of individual blanking mechanisms configured to individually deflect a corresponding beam of multi charged particle beams so as to control ON/OFF of the corresponding beam
Implementation Method 2
a common blanking mechanism configured to include a plurality of electrode groups, each composed of facing electrodes... and to collectively deflect the multi charged particle beams in order to control an exposure time
Data Source
AI summary
A blanking device for multi charged particle beams includes a plurality of individual blanking mechanisms configured to individually deflect a corresponding beam of multi charged particle beams so as to control ON/OFF of the corresponding beam, and a common blanking mechanism configured to include a plurality of electrode groups, each composed of facing electrodes, where an array pitch of a plurality of electrode groups is smaller than or equal to a pitch of the multi charged particle beams, and to collectively deflect the multi charged particle beams in order to control an exposure time.