Multi-Beam Deflector Steering for IC Inspection Efficiency
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Solution Overview
Problem
Existing multi-beam charged-particle beam apparatuses face inefficiencies in beam current usage and individual beam quality, particularly in inspecting integrated circuits, as they collectively scan both regions of interest and non-interest, leading to redundant scanning and reduced throughput.
Innovation Solution
A multi-beam apparatus with an array of deflectors and corresponding drivers steers individual beamlets independently based on acquired profile data, using steering circuitry to generate and compensate driving signals, allowing each beamlet to focus on regions of interest while avoiding non-interest areas, thereby optimizing beam usage and scanning efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If multiple charged-particle beams are used to increase inspection throughput, then productivity is improved, but beam current usage efficiency deteriorates due to collective scanning of both regions of interest and non-interest
Solution Approach 1:
The patent divides the sample inspection area into multiple independent regions of interest (ROIs) and assigns each beamlet to inspect a specific ROI independently. This segmentation allows beamlets to focus only on relevant areas rather than collectively scanning the entire sample, thereby improving beam current usage efficiency while maintaining high inspection throughput through parallel processing of multiple ROIs
Solution Approach 2:
The patent implements dynamic beamlet steering where each beamlet's position and scanning path are independently controlled based on the specific characteristics and location of its assigned ROI. This dynamic adjustment enables beamlets to adapt their trajectories in real-time to follow only the necessary inspection paths within each ROI, reducing redundant scanning of non-interest areas while preserving parallel inspection capability
2Productivity
If multiple charged-particle beams are used to increase inspection throughput, then productivity is improved, but individual beam quality deteriorates
Solution Approach 1:
The patent assigns dedicated beamlets to specific regions of interest, creating independent inspection channels. Each beamlet operates autonomously within its assigned ROI without interference from other beamlets, preserving individual beam quality and focusing capability while achieving high throughput through the parallel operation of multiple segmented beam channels
Solution Approach 2:
The patent optimizes each beamlet's parameters and steering characteristics according to the specific requirements of its assigned ROI. This localized optimization ensures that each beam maintains its optimal quality for the particular inspection task at hand, rather than using uniform settings for all beamlets, thereby preserving individual beam quality across diverse inspection scenarios
3Loss of energy
If individual beamlet steering is implemented to improve scanning efficiency, then beam current usage efficiency is improved, but device complexity increases due to array of deflectors and steering circuitry
Solution Approach 1:
The patent replaces mechanical beam steering mechanisms with electromagnetic deflectors and electronic control systems. This substitution enables precise individual beamlet steering through electronic signals rather than mechanical adjustments, achieving high beam current usage efficiency while the electronic system's rapid response and programmability help manage the inherent complexity through software control
Solution Approach 2:
The patent employs a standardized array of deflectors and steering circuitry that can be universally applied across multiple beamlets. This universal design allows the same hardware components to serve multiple functions by controlling different beamlets, reducing the overall complexity compared to having separate steering mechanisms for each beamlet, while still enabling independent control of each beam to regions of interest
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enhances the throughput and efficiency of defect detection in integrated circuit inspection by preferentially directing beamlets to relevant features, reducing redundant scanning and improving overall process yield and product reliability.
Implementation Method 1
an array of deflectors configured to steer individual beamlets of multiple beamlets
Data Source
AI summary
Systems and methods of observing a sample in a multi-beam apparatus are disclosed. A multi-beam apparatus may comprise an array of deflectors configured to steer individual beamlets of multiple beamlets, each deflector of the array of deflectors having a corresponding driver configured to receive a signal for steering a corresponding individual beamlet. The apparatus may further include a controller having circuitry to acquire profile data of a sample and to control each deflector by providing the signal to the corresponding driver based on the acquired profile data, and a steering circuitry comprising the corresponding driver configured to generate a driving signal, a corresponding compensator configured to receive the driving signal and a set of driving signals from other adjacent drivers associated with adjacent deflectors and to generate a compensation signal to compensate a corresponding deflector based on the driving signal and the set of driving signals.