Multi-Beam Laser Path Control for Oriented Irradiation Patterns

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Solution Overview

Problem

Existing processing systems face challenges in efficiently and precisely processing objects using laser light, particularly in forming and moving irradiation areas to achieve desired patterns or modifications on the object's surface.

Innovation Solution

A processing system that utilizes a processing apparatus to irradiate an object with spatially separated processing beams, forming multiple irradiation areas and moving them along a target movement route, controlled by a beam movement apparatus and a control apparatus that adjusts the arrangement direction and deflected angles of the beams.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If a single beam movement apparatus is used to move multiple processing beams, then the system structure is simplified, but it becomes difficult to independently control the movement routes of each beam

Engineering Contradiction:
Improvesystem structureVSAvoidindependent beam control
Core Design Contradiction:
Device complexityVSAdaptability or versatility

Solution Approach 1:

The beam movement apparatus is divided into multiple independent sub-apparatuses, each responsible for controlling a specific processing beam. This segmentation allows each beam to have its own independent movement control while maintaining an overall coordinated system, resolving the contradiction between structural simplicity and independent control capability.

Inventive Principle:
Principle #1Segmentation

2Adaptability or versatility

If multiple beam movement apparatuses are used to independently control each processing beam, then independent control is achieved, but the system structure becomes complex

Engineering Contradiction:
Improveindependent beam controlVSAvoidsystem structure
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

Multiple beam movement apparatuses are integrated into a unified control system with coordinated operation. The apparatuses share common control logic and synchronization mechanisms, merging their functions to achieve independent beam control while avoiding the complexity of completely separate systems.

Inventive Principle:
Principle #5Merging (Combining)

3Ease of operation

If processing beams are moved along fixed predetermined routes, then the control system is simple, but the system lacks flexibility to adapt to different processing patterns

Engineering Contradiction:
Improvecontrol system simplicityVSAvoidprocessing pattern flexibility
Core Design Contradiction:
Ease of operationVSAdaptability or versatility

Solution Approach 1:

The beam movement routes are made dynamically adjustable rather than fixed. The control system can modify movement parameters and routes in real-time based on different processing requirements, allowing the system to adapt to various processing patterns while maintaining ease of operation through automated control.

Inventive Principle:
Principle #15Dynamics

4Ease of operation

If the arrangement direction of irradiation areas is fixed, then the system is easier to control, but it cannot accommodate complex pattern requirements

Engineering Contradiction:
Improvecontrol easeVSAvoidpattern accuracy
Core Design Contradiction:
Ease of operationVSManufacturing precision

Solution Approach 1:

The system adds rotational degree of freedom to the beam movement control, allowing irradiation areas to be arranged not only along linear paths but also in rotational patterns. This dimensional enhancement enables complex pattern formation while maintaining control through coordinated angular and linear movements.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables precise and efficient processing of objects by allowing for the formation and movement of irradiation areas according to a predefined path, enhancing the capability to create complex patterns or modifications on the object's surface.

Implementation Method 1

a processing apparatus that irradiates an object with a plurality of processing beams

Methodology Applied
Scientific EffectLaser irradiation: Laser

Implementation Method 2

a beam movement apparatus that moves the plurality of processing beams by changing deflected angles of the plurality of processing beams

Methodology Applied
Scientific EffectBeam deflection: Reflection

Implementation Method 3

an irradiation optical system that condenses the plurality of processing beams generated by the beam generation apparatus to form a plurality of irradiation areas on the surface of the object

Methodology Applied
Scientific EffectOptical condensation: Focusing

Data Source

PatentEP4620608A1Processing system
Publication Date: 2025.09.24 NIKON CORP
  • EP4620608A1 patent drawingFigure 1
  • EP4620608A1 patent drawingFigure 2
  • EP4620608A1 patent drawingFigure 3

AI summary

A processing system includes: a processing apparatus that processes an object by irradiating the object with beams to form arranged irradiation areas on a surface of the object; and a control apparatus that controls the processing apparatus, the processing apparatus includes: a generation apparatus that generates the beams; a first movement apparatus that moves the beams generated by the generation apparatus; and a second movement apparatus that changes an arrangement direction along which the irradiation areas are arranged, the control apparatus controls the first movement apparatus so that the irradiation areas move along a target movement route and controls the second movement apparatus so as to change the arrangement direction of the irradiation areas based on the target movement route.