Multi-Beam Laser Scanning for Precise Substrate Processing
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Solution Overview
Problem
Current laser processing technologies lack the ability to efficiently divide and adjust laser beams for precise processing of materials, particularly in applications like display panel processing, where high precision and minimal impact on surroundings are required.
Innovation Solution
A laser processing apparatus that divides a single laser beam into multiple beams, allowing for independent adjustment of their paths and output intensities, using a scanner and lens unit with reflection members to focus and direct the beams accurately onto a target object.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a single laser beam is used for material processing, then the device structure is simple, but the processing precision and efficiency are insufficient
Solution Approach 1:
The patent applies segmentation by dividing a single laser beam into multiple beams (first laser beam and second laser beam) using a beam splitter. This allows independent control and adjustment of each beam's path and intensity, thereby improving processing precision without requiring multiple independent laser sources, thus avoiding excessive device complexity.
2Productivity
If multiple independent laser beams are used for processing, then processing efficiency increases, but the device complexity and cost increase
Solution Approach 1:
The patent merges multiple laser beam control functions into a single laser source system. By using one laser beam generator that is split into multiple beams, the system achieves multi-beam processing efficiency while avoiding the complexity and cost of multiple independent laser generators. The scanner and lens unit further integrate beam control functions.
Solution Approach 2:
The patent adds the dimension of beam splitting and independent path control to a single laser source. Instead of increasing the number of laser sources, it introduces optical path division through a beam splitter, allowing multiple beams to be generated and independently controlled in different spatial paths, thereby improving productivity without proportional increase in device complexity.
3Adaptability or versatility
If laser beam paths are not adjusted, then the device structure is simple, but the adaptability to different processing requirements is limited
Solution Approach 1:
The patent introduces dynamic adjustability to the laser beam system through a scanner that can independently adjust the paths of the first and second laser beams. This allows the system to adapt to different processing requirements by dynamically changing beam directions and focal points, while the lens unit provides dynamic focusing control, enhancing versatility without excessive complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise and efficient processing of materials by increasing the number of laser beams per unit area, improving processing efficiency and minimizing the need for additional surface smoothing steps, as demonstrated in glass and substrate processing.
Implementation Method 1
a beam splitter configured to split the laser beam into a first laser beam and a second laser beam
Implementation Method 2
a beam splitter configured to split the laser beam into a first laser beam and a second laser beam
Implementation Method 3
a scanner including a first reflection member configured to receive the first laser beam and adjust a path of the first laser beam, and a second reflection member configured to receive the second laser beam, adjust a path of the second laser beam
Implementation Method 4
a lens unit configured to condense the first laser beam and the second laser beam received from the scanner
Data Source
AI summary
A laser processing apparatus includes: a scanner configured to adjust a path of at least one of a first laser beam and a second laser beam; and a lens unit configured to condense the first laser beam and the second laser beam received from the scanner. The scanner may include a first reflection member for providing the first laser beam to the lens unit and a second reflection member for providing the second laser beam to the first reflection member.