Multi-Beam Lithography Throughput via Variable Focal Volume
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Lithography-based generative manufacturing of three-dimensional components using multiphoton absorption is limited by low throughput due to the small focal point volume, resulting in long construction times, despite achieving high structural resolution.
Innovation Solution
The method involves splitting the beam into multiple beams using a beam splitter and employing acousto-optic modulator modules to independently control the position and intensity of each beam, allowing for parallel writing and varying the focal point volume to increase writing speed without compromising resolution.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a small focal point volume is used to achieve high structural resolution, then manufacturing precision is improved, but productivity deteriorates due to the need to irradiate a large number of points
Solution Approach 1:
The patent divides the component construction into two separate processes: a first construction process using a small focal point volume for high-resolution surface structures, and a second construction process using a large focal point volume for low-resolution interior structures. This segmentation allows each process to be optimized for its specific purpose, resolving the contradiction between resolution and throughput.
Solution Approach 2:
The patent applies different focal point volumes to different regions of the component: small focal point volumes are used for surface regions requiring high structural resolution, while large focal point volumes are used for interior regions where lower resolution is acceptable. This local differentiation optimizes both resolution and throughput by matching focal volume to regional requirements.
2Productivity
If a large focal point volume is used to increase throughput, then productivity is improved, but manufacturing precision deteriorates
Solution Approach 1:
The patent segments the construction process into two distinct phases: first constructing interior regions with large focal point volumes for high throughput, then constructing surface regions with small focal point volumes for high precision. This temporal and spatial segmentation allows large focal volumes to be used without compromising overall component resolution.
Solution Approach 2:
The patent applies large focal point volumes specifically to interior regions where high resolution is less critical, while reserving small focal point volumes for surface regions requiring high structural resolution. This localized application of different focal volumes optimizes writing speed in appropriate regions without sacrificing overall precision.
3Manufacturing precision
If the focal point volume is varied during construction, then both high resolution and high throughput can be achieved, but device complexity increases
Solution Approach 1:
The patent changes the focal point volume parameter between two discrete states (small and large) corresponding to two different objective lenses. This parameter change is controlled by a switching mechanism that selects between lenses based on the construction region, enabling resolution-throughput optimization without requiring continuous parameter adjustment or complex variable focal volume mechanisms.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach significantly increases writing speed by enabling simultaneous solidification of multiple volume elements with high structural resolution, reducing construction time by allowing larger focal point volumes for interior layers and smaller volumes for surface details.
Implementation Method 1
a beam emitted by an electromagnetic radiation source is focused onto a focal point within a material by means of an optical imaging unit and the focal point is displaced by means of a deflection unit arranged upstream of the optical imaging unit in the beam direction, as a result of which a volume element of the material located at the focal point is each successively solidified by means of multiphoton absorption
Implementation Method 2
a number of acousto-optic modulator modules corresponding to the number of beams being provided, so that an acousto-optic modulator module which diffracts the beam is arranged in the beam path of each beam
Data Source
AI summary
In a method for a lithography-based generative manufacture of a three-dimensional component, a beam is split into a plurality of beams by a beam splitter, said beams being focused onto focal points within a material by means of an optical imaging unit, wherein the focal points are adjusted by means of a deflecting unit which is arranged upstream of the optical imaging unit in the beam direction, whereby a volume element of the material is solidified by means of multi-photon absorption at the focal point of each beam one after the other, and a number of acousto-optical modulator modules, said number corresponding to the number of beams, is provided such that an acousto-optical modulator module is arranged in the beam path of each beam.