Multi-Blade Robot Handling Substrates Across Varying Vertical Pitches
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Solution Overview
Problem
Conventional electronic device manufacturing apparatuses face inefficiencies in substrate transport between chambers, particularly due to limitations in robot apparatus design, which can lead to bottlenecks in the transfer process and require multiple robotic arms for simplified construction.
Innovation Solution
A robot apparatus with three independently controllable blades, each with an end effector, is introduced, allowing for enhanced efficiency and reduced arm count by enabling simultaneous substrate handling and transfer between process chambers and load lock chambers with varying vertical pitches, utilizing a compact configuration and common drive assembly.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If conventional robot apparatus with dual blades is used, then the structure is simpler, but it cannot efficiently handle substrates in load locks with different vertical pitches
Solution Approach 1:
The robot apparatus divides substrate handling into three independent blades, each capable of independent rotation and substrate transport. This segmentation allows each blade to be independently controlled to match the specific vertical pitch requirements of different load locks, enabling the system to handle multiple pitch configurations without requiring complete structural redesign.
Solution Approach 2:
The three-blade configuration provides universal adaptability across load locks with varying vertical pitches. By having three independently controllable blades instead of two, the robot can service load locks with different pitch requirements using the same apparatus, making the system multi-functional and adaptable to diverse chamber configurations.
2Productivity
If multiple robotic arms are used to handle substrates, then substrate transport capability is improved, but the device complexity and construction difficulty increase
Solution Approach 1:
The patent merges the functionality of multiple robotic arms into a single integrated robot apparatus with three blades. Instead of using separate robotic arms for different tasks, all three blades are integrated into one robot system that can simultaneously or sequentially handle substrates for multiple load locks, reducing construction complexity while maintaining high productivity.
Solution Approach 2:
The three blades are configured for independent rotation, providing dynamic flexibility in substrate handling. This dynamic capability allows the robot to adapt its configuration in real-time to service different load lock pitches and handle multiple substrates efficiently, achieving high productivity without requiring multiple fixed robotic arms.
3Device complexity
If a compact robot configuration is used, then the device complexity is reduced, but the ability to service load locks with different vertical pitches is limited
Solution Approach 1:
Each of the three blades can be independently positioned and controlled to match the specific vertical pitch requirements of different load locks. This local quality approach allows each blade to be optimized for its specific task while maintaining a compact overall robot configuration, resolving the contradiction between simplicity and adaptability.
Data Source
AI summary
Electronic device manufacturing apparatus and robot apparatus are described. The apparatus are configured to efficiently pick and place substrates wherein the robot apparatus includes an upper arm and three blades B1, B2, B3 that are independently rotatable. The three blades are configured to service a first dual load lock and second dual load lock wherein each dual load lock includes a different pitch. In some embodiments, a first pitch P1 is smaller than a second pitch P2. Blades B2 and B3 (or optionally blades B1 and B2) can service the first dual load lock with Pitch P1 and blades B1 and B3 can service the second dual load lock including the second pitch P2. Methods of operating the electronic device manufacturing apparatus and the robot apparatus are provided, as are numerous other aspects.