Multi-Cartridge Precursor Gas Injection for Rapid Switching
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Solution Overview
Problem
Existing gas injection systems for FIB, SEM, and dual-beam FIB/SEM systems struggle with handling multiple precursor gases, require lengthy switching times, and involve complex setup and handling of chemicals.
Innovation Solution
A gas injection system with a housing for multiple precursor cartridges, a nozzle, and integrated valves, which maintains a vacuum envelope and temperature control to facilitate rapid switching and prevent condensation, allowing simultaneous delivery of multiple precursors without disturbing the sample chamber vacuum.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a single gas injection system is used to handle multiple precursor gases, then device complexity is reduced, but switching time between precursors increases
Solution Approach 1:
The system divides the precursor storage into separate cartridges, each containing a different precursor gas. These cartridges are individually housed in separate cartridge housings within the vacuum envelope, allowing rapid switching by simply changing which cartridge is connected to the delivery line, thus maintaining low switching time while using a single injection system.
Solution Approach 2:
The system employs dynamic valve control to switch between different precursor cartridges. The valves can rapidly open or close connections to different cartridges, enabling fast precursor switching without physical movement of the entire injection system, thereby resolving the contradiction between system simplicity and switching speed.
2Productivity
If precursor cartridges are heated to enable gas delivery, then precursor gas delivery is improved, but condensation risk in delivery lines increases
Solution Approach 1:
The system controls the temperature parameter of the delivery lines to prevent condensation. By maintaining the delivery lines at an elevated temperature through heating elements, the system ensures that precursor gases remain in the gas phase during transport, preventing condensation while still allowing efficient delivery from the heated cartridges.
Solution Approach 2:
Different temperature zones are created within the system: precursor cartridges are heated to high temperatures to enable vaporization and gas delivery, while delivery lines are maintained at moderate elevated temperatures to prevent condensation. This local differentiation of temperature quality allows both functions to coexist without conflict.
3Reliability
If multiple precursor cartridges are housed in a vacuum envelope, then cross-contamination is prevented, but system complexity increases
Solution Approach 1:
Multiple precursor cartridges are merged into a single vacuum envelope structure, creating a unified isolated environment that prevents cross-contamination between different precursors. The vacuum envelope acts as a common barrier for all cartridges, reducing the need for individual sealing mechanisms for each cartridge while maintaining reliability.
Solution Approach 2:
The vacuum envelope serves multiple functions simultaneously: it provides vacuum isolation to prevent cross-contamination, houses multiple cartridges, and maintains the necessary environment for precursor storage. This multi-functionality reduces overall system complexity compared to having separate sealed systems for each cartridge.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables efficient, rapid switching between precursor gases, preventing condensation and cross-contamination, and allowing continuous processing with a single gas injector, reducing the need for multiple systems and adjustments.
Implementation Method 1
individually heating the plurality of gas precursor cartridges to a temperature sufficient to produce one or more precursor gasses from the one or more precursor materials
Implementation Method 2
The nozzle and the housing are configured to form a vacuum envelope around the precursor cartridge and the one or more delivery lines
Data Source
AI summary
The present disclosure provides a gas injection system that can include a housing configured to hold a plurality of precursor cartridges comprising one or more precursor materials, and a nozzle extending from the housing, the nozzle having a tip configured for insertion into a sample chamber of a material processing apparatus. The precursor cartridges are fluidly connected to the nozzle to selectively deliver one or more precursor gasses to the sample chamber.