Multi-Cassette Load Port Carrier for Semiconductor Tool Productivity
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Solution Overview
Problem
Conventional load ports can only support one cassette at a time, leading to increased loading/unloading time, reduced tool productivity, and higher costs due to the need for multiple load ports and additional fabrication space.
Innovation Solution
A load port with a carrier that buffers multiple cassettes, allowing sequential loading and unloading, increasing capacity and reducing the time interval between operations, thereby enhancing productivity and reducing the number of load ports required.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a conventional load port supports only one cassette at a time, then the structure is simple and cost is low, but the loading/unloading time increases and tool productivity decreases
Solution Approach 1:
The load port is segmented into multiple loading/unloading ports (first loading port, first unloading port, second loading port, second unloading port) arranged in different directions. This segmentation allows simultaneous or sequential handling of multiple cassettes, enabling the system to service multiple process stations concurrently and eliminating the time loss associated with single-cassette handling.
Solution Approach 2:
Multiple loading and unloading functions are merged into a single load port structure. The load port integrates both loading capabilities (first loading port, second loading port) and unloading capabilities (first unloading port, second unloading port) within one unit, allowing it to handle multiple cassettes simultaneously and improve overall productivity without requiring separate dedicated load ports for each function.
2Productivity
If multiple load ports are provided to handle multiple cassettes, then the capacity increases, but the fabrication space and costs increase
Solution Approach 1:
The load port is designed as a multi-functional unit that can handle multiple cassettes through its multiple loading and unloading ports. Instead of requiring separate dedicated load ports for each cassette handling function, this universal load port structure performs multiple functions (loading from different directions, unloading to different directions) within a single unit, thereby increasing processing capacity without proportionally increasing fabrication space requirements.
Solution Approach 2:
The load port utilizes three-dimensional spatial arrangement by providing loading ports and unloading ports in different directions (front, rear, left, right sides). This dimensional approach allows multiple cassettes to be handled simultaneously from different spatial directions, effectively increasing capacity without requiring proportional increases in the horizontal fabrication space footprint.
3Quantity of substance
If a load port handles multiple cassettes sequentially, then the capacity increases, but the device complexity increases
Solution Approach 1:
The load port structure is segmented into distinct functional modules: multiple loading ports (first loading port, second loading port), multiple unloading ports (first unloading port, second unloading port), and corresponding actuators (first input table actuator, second input table actuator). This modular segmentation allows the system to handle multiple cassettes while maintaining a relatively simple and maintainable structure, as each module can be independently controlled and serviced.
Data Source
AI summary
A load port for a processing tool includes a carrier, a carrier actuator, an input table, an input table actuator, and a controller. The carrier has a plurality of cassette buffering spaces. The carrier is movable relative to the processing tool. The carrier actuator is operably connected to the carrier. The input table is configured to receive at least one cassette. The input table is movable relative to the carrier. The input table actuator is operably connected to the input table. The controller is configured to control the carrier actuator to move the carrier, such that one of the cassette buffering spaces is aligned with the input table, configured to control the input table actuator to move the input table with the cassette into the aligned cassette buffering space, and configured to control the input table to load the cassette into the aligned cassette buffering space.