Multi-Chamber CMUT Structure for Sensitivity and Sound Pressure
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Solution Overview
Problem
Conventional capacitive micromachined ultrasonic transducers (CMUTs) face limitations in receiving sensitivity and output sound pressure due to chamber height constraints, where reducing height improves sensitivity but limits resonant amplitude and output sound pressure, while increasing height enhances output sound pressure but reduces sensitivity and increases driving voltage.
Innovation Solution
A novel CMUT design with a multi-chamber structure and adjustable resonant plates, allowing for varying chamber heights and deformable resonant plates to optimize receiving and sending functions, enabling independent adjustment of chamber heights for improved sensitivity and sound pressure.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the chamber height is reduced, then the receiving sensitivity is improved and the driving voltage is reduced, but the resonant amplitude and output sound pressure are significantly limited
Solution Approach 1:
The device is divided into multiple independent chambers (first chamber, second chamber, third chamber, etc.) with different height configurations. Each chamber can be independently optimized for specific functions - some chambers have smaller heights for high sensitivity reception, while others have larger heights for high power transmission, allowing simultaneous optimization of both receiving sensitivity and output sound pressure without compromise
Solution Approach 2:
Different chambers are designed with different local characteristics - specifically different heights tailored to their specific functions. The first chamber has a smaller height optimized for receiving sensitivity, while the second chamber has a larger height optimized for output sound pressure. This local differentiation allows each chamber to excel at its specific task rather than compromising overall performance
2Power
If the chamber height is increased, then the output sound pressure is increased, but the receiving sensitivity decreases and the driving voltage increases
Solution Approach 1:
The device segments the ultrasonic transducer function across multiple chambers with different height configurations. The second chamber with larger height provides high output sound pressure, while the first chamber with smaller height provides high receiving sensitivity. This segmentation allows the system to achieve both high power and high sensitivity simultaneously through functional distribution
Solution Approach 2:
The multi-chamber structure provides multi-functionality within a single device - it can simultaneously perform high-sensitivity reception in the first chamber and high-power transmission in the second chamber. The resonant plates and chambers are designed to handle both receiving and sending functions with optimized height configurations for each function
3Power
If the chamber height is increased, then the output sound pressure is increased, but the driving voltage increases
Solution Approach 1:
The device segments the energy requirements of different functions into separate chambers. The second chamber with larger height is optimized for high output sound pressure, while the first chamber with smaller height operates at lower driving voltage for high sensitivity reception. This segmentation distributes the energy burden rather than requiring the entire system to operate at high voltage
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The novel CMUT design achieves enhanced receiving sensitivity and output sound pressure by dynamically adjusting chamber heights, overcoming the limitations of conventional CMUTs by maximizing sending chamber height and minimizing receiving chamber height.
Implementation Method 1
at least one of the resonant plates shared by the upper and lower adjacent chambers is capable of deforming
Implementation Method 2
a vacuum chamber which is formed between the electrodes to form a variable capacitor as an electromechanical transformer
Implementation Method 3
the resonance amplitude and the output sound pressure are significantly limited
Data Source
AI summary
A novel capacitive micromachined ultrasonic transducer (CMUT) and a control method are provided. The novel CMUT includes a substrate, a plurality of chambers provided on the substrate, and a plurality of resonant plates. The resonant plate is at least disposed at a top of each chamber, upper and lower adjacent chambers share a resonant plate, at least two of the plurality of chambers have different heights in a natural state, and/or, at least one of the resonant plates shared by the upper and lower adjacent chambers is capable of deforming. In this way, in the scenario of receiving an ultrasonic signal, the chamber with a relatively small height in a natural state or after deformation may serve as a receiving chamber, and in the scenario of sending the ultrasonic signal, the chamber with a relatively large height in the natural state or after deformation may serve as a sending chamber.