Multi-Chamber Gas Injector for Uniform Deposition
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Solution Overview
Problem
Existing gas delivery systems in material deposition systems face challenges in achieving uniformity of thickness and chemical composition of layers due to non-uniform gas flow over substrates.
Innovation Solution
The injector system, comprising a gas inlet port, distribution chamber, intermediate chamber, and delivery manifold, is designed to manage gas expansion and flow division to create a stable, uniform gas flow through elongate apertures, forming a curtain or blade of gas that ensures uniform deposition across substrates.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a conventional nozzle arrangement is used to deliver gaseous precursor compounds, then the system structure is simple, but the uniformity of thickness and chemical composition of layers formed on the substrate deteriorates due to non-uniform gas flow
Solution Approach 1:
The injector is divided into multiple functional chambers: a distribution chamber with multiple outlet apertures, an intermediate chamber that divides flow into first and second flowpaths, and a delivery manifold. This segmentation allows independent control and optimization of gas flow distribution to achieve uniform deposition across the substrate.
Solution Approach 2:
Different regions of the injector are designed with different aperture configurations and flowpath characteristics to address local flow requirements. The distribution chamber has multiple apertures positioned at specific locations, and the intermediate chamber divides flow into separate paths that converge in the delivery manifold, creating locally optimized flow conditions for uniform overall distribution.
2Productivity
If gas flow is increased to improve deposition rate, then productivity increases, but gas flow uniformity over the substrate deteriorates leading to non-uniform deposition
Solution Approach 1:
The distribution chamber incorporates multiple outlet apertures that distribute gas flow into several separate streams. This segmentation prevents any single flow path from becoming overloaded, maintaining uniformity even at higher overall flow rates required for increased productivity.
Solution Approach 2:
The injector design transitions from a single-dimension flow path to a multi-dimensional flow distribution system with multiple apertures and diverging/converging flowpaths. This dimensional expansion allows simultaneous high flow rate and uniform distribution by utilizing spatial distribution across multiple flow paths.
3Manufacturing precision
If a simple delivery system is used, then device complexity is low, but gas flow uniformity and deposition uniformity deteriorate
Solution Approach 1:
The delivery system is segmented into distinct functional chambers (distribution chamber, intermediate chamber, delivery manifold) with specific aperture configurations in each. This segmentation enables precise control of gas flow characteristics to achieve uniform deposition, justifying the increased structural complexity through improved manufacturing precision.
Solution Approach 2:
The multi-chamber injector structure serves multiple functions simultaneously: the distribution chamber distributes gas to multiple paths, the intermediate chamber divides and regulates flow, and the delivery manifold converges flows for final delivery. This multi-functionality achieves uniform deposition while the modular design allows for standardized manufacturing despite the apparent complexity.
4Productivity
If hazardous gases are used for deposition, then material deposition capability is improved, but safety and contamination control deteriorate
Solution Approach 1:
The injector chambers are designed as sealed, segmented compartments that contain hazardous gases within defined boundaries. This segmentation prevents uncontrolled leakage and allows for targeted safety measures in each chamber, enabling the use of hazardous precursor gases while maintaining safety and contamination control.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enhances the uniformity of gas flow and material deposition, preventing leakage and contamination, and allows for continuous processing at atmospheric pressure, even with hazardous gases, by maintaining a stable curtain of inert gas around the deposition region.
Implementation Method 1
the distribution chamber may be arranged to allow expansion of gas entering therein and/or passage of gas therethrough
Implementation Method 2
grow a thin film of a material on a substrate by establishing a flow of a gaseous precursor compounds over the substrate
Implementation Method 3
The substrate is heated to promote decomposition of the precursor and increase the rate of deposition of material on the substrate
Data Source
Figure 1
Figure 2
Figure 3(a)~3(b)
AI summary
P300498WO SPEC 34 INJECTOR AND METHOD ABSTRACT Some embodiments of the present invention provide an injector for injecting a gas in a materials deposition system, the injector comprising: a gas inlet port for coupling the injector to a gas source; a distribution chamber, an intermediate chamber and a delivery manifold coupled in series to provide a flowpath for the gas between the inlet port and at least one delivery aperture through which the gas is injectable in the deposition system, the distribution chamber being arranged to allow expansion of gas entering therein, the injector having at least a first distribution chamber outlet aperture through which gas may flow from the distribution chamber to the intermediate chamber and at least first and second intermediate chamber outlet apertures through which gas may flow from the intermediate chamber to the delivery manifold, the intermediate chamber being arranged to divide a flow of gas therethrough between first and second flowpaths, the first and second intermediate chamber outlet apertures being provided in the respective flowpaths, the injector being arranged to allow the first and second flowpaths to converge within the delivery manifold.