Multi-Chamber Spray Unit for Stable, Particle-Filtered Substrate Cleaning
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Solution Overview
Problem
Existing cleaning technologies for flat panel display substrates struggle to effectively remove foreign substances and particles, leading to reduced quality and adherence issues during thin film deposition, and fail to maintain stable pressure and prevent stains during the cleaning process.
Innovation Solution
A spray unit with a body assembly featuring a flow channel with multiple chambers and internal slits, which filters foreign substances and maintains stable pressure, ensuring consistent and efficient cleaning solution delivery through a spray slit.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a conventional spray nozzle is used to deliver cleaning solution, then the structure is simple, but the pressure stability is poor and foreign substances cannot be effectively filtered
Solution Approach 1:
The spray device is segmented into multiple functional chambers (first chamber for solution storage, second chamber for pressure regulation, third chamber for spray delivery) connected by flow channels and internal slits. This segmentation allows each chamber to perform a specific function, ensuring stable pressure delivery while filtering foreign substances through the internal slit structure.
Solution Approach 2:
The internal slits act as intermediary elements between the first chamber and second chamber, serving as both flow restrictors for pressure stabilization and filters for removing foreign substances. These slits mediate the transition of cleaning solution from storage to spray delivery while maintaining pressure stability and purity.
2Reliability
If a simple flow channel is used, then the device complexity is low, but foreign substances in the cleaning solution cannot be filtered
Solution Approach 1:
The internal slits function as porous filtering structures within the flow channel, allowing the cleaning solution to pass through while trapping foreign substances. The slit geometry provides filtering capability without requiring complex porous materials, maintaining structural simplicity while achieving effective particle removal.
Solution Approach 2:
The flow channel is segmented into multiple sections with internal slits positioned at strategic locations to create staged filtering. This segmentation allows foreign substances to be removed at different points in the flow path, ensuring high cleaning quality while keeping the overall structure relatively simple.
3Manufacturing precision
If multiple chambers and internal slits are added to filter foreign substances and stabilize pressure, then the cleaning quality improves, but the device complexity increases
Solution Approach 1:
The internal slits serve multiple functions simultaneously: they act as flow restrictors for pressure stabilization, as filters for foreign substance removal, and as flow distributors for uniform spray pattern. This multi-functionality reduces the need for separate components, thereby limiting the increase in device complexity while achieving high cleaning precision.
Solution Approach 2:
The device merges the functions of pressure regulation, filtration, and spray delivery into an integrated chamber system. By combining these functions into a unified structure with interconnected chambers and internal slits, the design achieves high manufacturing precision without proportionally increasing complexity, as the components work together in a coordinated manner.
4Reliability
If the internal slits have small cross-sectional area for filtering, then foreign substance removal improves, but the flow rate decreases
Solution Approach 1:
The flow path is segmented into multiple chambers with multiple internal slits distributed throughout. This segmentation allows the total flow rate to be maintained by providing multiple parallel flow paths, while each individual slit remains small enough to effectively filter particles. The cumulative effect of multiple slits maintains productivity while achieving reliable particle removal.
Solution Approach 2:
The multi-chamber design with internal slits creates continuous flow paths that maintain steady solution delivery. The internal slits ensure continuous filtration without interrupting the overall flow, and the chamber structure maintains continuous pressure, ensuring that particle removal efficiency is sustained without significant reduction in solution flow rate to the substrate.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The spray unit effectively filters foreign substances, maintains stable pressure, and prevents stains, improving the efficiency and quality of substrate cleaning by ensuring a consistent and smooth cleaning process.
Implementation Method 1
a flow channel in the body assembly, the flow channel connected with the solution supply port, the cleaning solution to flow through the flow channel, the flow channel including at least two chambers to hold the cleaning solution and at least two internal slits connecting the chambers to each other
Data Source
AI summary
A spray unit, including a body assembly including a solution supply port, the solution port to supply cleaning solution; a flow channel in the body assembly, the flow channel connected with the solution supply port, the cleaning solution to flow through the flow channel; and a spray slit connected to the flow channel, the spray slit to spray out the cleaning solution, the flow channel including at least two chambers to hold the cleaning solution and at least two internal slits connecting the chambers to each other.