Multi-Chamber Temperature Measurement Using Segmented Optical Paths
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Solution Overview
Problem
Conventional temperature measuring technologies struggle to simultaneously measure temperatures in multiple processing chambers, especially when measurement lights are converted by a multiplexer and supplied to these chambers, leading to inefficiencies in temperature measurement.
Innovation Solution
A temperature measuring apparatus and method utilizing a light source, multiple light separating units, a reference light reflecting unit, and photodetectors to divide and transmit light to multiple measurement points, with adjustable light path lengths to prevent interference overlap, allowing for simultaneous temperature measurement across multiple processing chambers.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If measurement lights are converted by a multiplexer and supplied to multiple processing chambers, then the device complexity is reduced, but the temperatures cannot be simultaneously measured
Solution Approach 1:
The patent divides the measurement light into multiple independent measurement lights (first measurement light, second measurement light, third measurement light, fourth measurement light) using multiple light separating units. Each measurement light is transmitted to a different processing chamber through separate optical paths, enabling simultaneous temperature measurement in multiple chambers without using a multiplexer that would sequentialize the measurements.
2Productivity
If multiple measurement lights are transmitted to multiple processing chambers through separate optical paths, then simultaneous temperature measurement is enabled, but the device complexity increases
Solution Approach 1:
The patent employs multiple light separating units (first light separating unit, second light separating unit, third light separating unit, fourth light separating unit) to divide the measurement light into separate measurement lights for different processing chambers. This segmentation enables simultaneous temperature measurement across multiple chambers by creating independent optical paths for each chamber, thereby improving measurement productivity despite the increased number of separating units.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables efficient and simultaneous temperature measurement across multiple processing chambers by preventing interference overlap and reducing measurement time, while maintaining a simple structure and avoiding unnecessary interference.
Implementation Method 1
a plurality of photodetectors which measure interference between the first to n-th measurement lights reflected by the objects to be measured and the reference lights reflected by the reference light reflecting unit
Implementation Method 2
a reference light reflecting unit which reflects the reference lights from the second light separating units
Data Source
AI summary
A temperature measuring apparatus and a temperature measuring method that may simultaneously measure temperatures of objects in processing chambers. The temperature measuring apparatus includes a first light separating unit which divides light from the light source into measurement lights; second light separating units which divide the measurement lights from the first light separating unit into measurement lights and reference lights; third light separating units which further divide the measurement lights into first to n-th measurement lights; a reference light reflecting unit which reflects the reference lights; an light path length changing unit which changes light path lengths of the reference lights reflected by the reference light reflecting unit; and photodetectors which measure interference between the first to n-th measurement lights reflected by the objects to be measured and the reference lights reflected by the reference light reflecting unit.