Multi-Core Interposer Stack-Up for Warpage-Resistant Scaling

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Solution Overview

Problem

Existing interposer substrates face challenges with scaling in size, leading to increased complexity, cost, and reliability issues due to material limitations such as warpage, cracking, and high manufacturing costs, particularly with glass and silicon substrates, while organic materials offer flexibility but lack thermal stability.

Innovation Solution

The use of interposer devices with multiple cores, each formed from different materials (e.g., glass, silicon, or organic) allows for a hybrid stack-up that reduces metallization levels and enables parallel fabrication, enhancing reliability and scalability by allowing early defect detection in smaller stacks before integration.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If a single large interposer substrate is used, then integration capacity increases, but warpage and cracking increase due to material limitations

Engineering Contradiction:
Improveintegration capacityVSAvoidsubstrate stability
Core Design Contradiction:
Adaptability or versatilityVSReliability

Solution Approach 1:

The interposer substrate is divided into multiple smaller core substrates (first core substrate, second core substrate, etc.) that are stacked vertically. This segmentation allows each core to be manufactured independently with reduced warpage and cracking risks, while the overall integration capacity is maintained through the stacked configuration and interconnect structures that electrically connect the cores.

Inventive Principle:
Principle #1Segmentation

2Stability of the object's composition

If glass or silicon substrates are used, then thermal stability improves, but manufacturing cost and complexity increase

Engineering Contradiction:
Improvethermal stabilityVSAvoidmanufacturing complexity
Core Design Contradiction:
Stability of the object's compositionVSDevice complexity

Solution Approach 1:

Different core substrates in the stack can be made from different materials optimized for their specific functions. For example, glass or silicon substrates can be used where thermal stability is critical, while organic substrates can be used in regions where flexibility and cost are more important. This local quality approach allows thermal stability to be provided only where needed, reducing overall manufacturing complexity and cost.

Inventive Principle:
Principle #3Local quality

3Ease of manufacture

If organic materials are used for interposer substrate, then flexibility and ease of manufacture improve, but thermal stability deteriorates

Engineering Contradiction:
Improvemanufacturing flexibilityVSAvoidthermal stability
Core Design Contradiction:
Ease of manufactureVSStability of the object's composition

Solution Approach 1:

The interposer device uses a composite structure with multiple core substrates made from different materials (glass, silicon, organic). This composite approach combines the manufacturing flexibility and cost benefits of organic materials with the thermal stability of glass and silicon substrates, creating an overall system that achieves both ease of manufacture and thermal stability through material diversity rather than relying on a single material's properties.

Inventive Principle:
Principle #40Composite materials

4Adaptability or versatility

If interposer size is scaled up, then integration capacity increases, but manufacturing cost and defect detection difficulty increase

Engineering Contradiction:
Improveintegration capacityVSAvoidmanufacturing cost
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The interposer is segmented into multiple smaller core substrates that can be manufactured independently at lower cost with easier defect detection. Each core can be fabricated, tested, and validated separately before being stacked and interconnected, significantly reducing the manufacturing cost and complexity compared to producing a single large interposer substrate, while still achieving high integration capacity through the stacked configuration.

Inventive Principle:
Principle #1Segmentation

Data Source

PatentUS20250372526A1Interposer devices with mutliple interposer cores
Publication Date: 2025.12.04 APPLIED MATERIALS INC
  • US20250372526A1 patent drawing
  • US20250372526A1 patent drawing
  • US20250372526A1 patent drawing

AI summary

Embodiments described herein relate interposer devices with multiple interposer cores. For example, a system can include a first stack of an interposer device and a second stack of the interposer device. The first stack can include a first core including a first core substrate and the second stack can include a second core including a second core substrate.