Multi-Curing Apparatus Chamber Alignment via Gear Drive
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Solution Overview
Problem
Existing semiconductor chip manufacturing processes face challenges in aligning positions between multiple chambers during the curing process, leading to inefficiencies and increased maintenance time due to repeated attachment and detachment of chambers, which can introduce particles and affect process uniformity.
Innovation Solution
A multi-curing apparatus is developed, utilizing an actuator and gear system to align positions between multiple chambers, allowing for synchronization without attaching or detaching them, using a combination of rotation transmission gears and driving gears to fix the alignment of one chamber relative to another, enhancing process uniformity and reducing maintenance time.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If chambers are repeatedly attached and detached for alignment, then alignment can be achieved, but maintenance time increases and particles are introduced
Solution Approach 1:
The patent implements a dynamic alignment system where chambers can be adjusted in position relative to each other using drive mechanisms during operation. The chambers are connected to actuators that enable dynamic positioning, allowing alignment to be achieved without repeated attachment and detachment, thereby reducing maintenance time while maintaining alignment precision.
Solution Approach 2:
The patent introduces intermediary alignment mechanisms (such as adjustment mechanisms and drive systems) that mediate between the chambers and the alignment requirement. These intermediaries enable precise positioning of chambers relative to each other without requiring complete detachment, thus reducing maintenance time while achieving the necessary alignment precision.
2Manufacturing precision
If chambers are repeatedly attached and detached for alignment, then alignment can be achieved, but particle introduction increases
Solution Approach 1:
The dynamic positioning system allows chambers to be adjusted in place during operation without complete detachment. The drive mechanisms enable chambers to be moved to alignment positions while remaining connected to the system, preventing particle introduction that would occur during repeated attachment and detachment operations.
Solution Approach 2:
Intermediary adjustment mechanisms are introduced that allow chambers to be positioned and aligned without breaking the sealed environment. These mechanisms enable alignment to be achieved through controlled movement rather than through attachment and detachment cycles, thereby preventing particle contamination.
3Manufacturing precision
If multiple chambers are synchronized using gear systems, then alignment precision improves, but device complexity increases
Solution Approach 1:
The patent divides the alignment system into modular segments, with each chamber having its own drive mechanism and control system. This segmentation allows for independent adjustment of each chamber while maintaining overall synchronization, achieving high alignment precision without requiring a single complex mechanical linkage system.
Solution Approach 2:
The patent implements universal drive mechanisms that can be applied to multiple chambers with similar functions. The same actuator and gear design is used across different chambers, standardizing the system and reducing overall complexity while maintaining the ability to synchronize multiple chambers with high precision.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The multi-curing apparatus improves the efficiency of the curing process by ensuring precise alignment between chambers, reducing maintenance time, and preventing particle introduction, thereby enhancing productivity and uniformity of semiconductor chip fabrication.
Implementation Method 1
utilizing an actuator and gear system to align positions between multiple chambers, allowing for synchronization without attaching or detaching them
Data Source
AI summary
A multi-curing apparatus includes an actuator, a first chamber including a first energy source head, a second chamber including a second energy source head, a first driver including a first rotation transmission gear gear-engaged with the actuator, and a first driving gear gear-engaged with the first chamber. The apparatus further includes a second driver including a second rotation transmission gear gear-engaged with the actuator, and a second driving gear gear-engaged with the second chamber. The apparatus aligns a position of the first chamber with reference to a position of the second chamber while the first rotation transmission gear, the second rotation transmission gear, and the second driving gear are fixed.