Multi-density MIM Capacitor for POG Multiplexer Quality Factor

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Solution Overview

Problem

The design of mobile RF transceivers at deep sub-micron process nodes faces complexity due to cost and power consumption considerations, with challenges in maintaining small feature sizes and achieving high performance in passive devices like capacitors and inductors, especially in multiplexers, where varying capacitance densities and quality factors are required across different frequency bands.

Innovation Solution

The implementation of multi-density metal-insulator-metal (MIM) capacitors with varying dielectric material thicknesses or constants within a passive device to accommodate different capacitance density specifications, allowing for reduced capacitor sizes while maintaining similar capacitance values, which improves the quality factor of inductors and accommodates a wide range of radio frequencies.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Volume of moving object

If capacitor size is reduced to meet spacing considerations at deep sub-micron process nodes, then device integration and power consumption improve, but capacitance value and quality factor deteriorate

Engineering Contradiction:
Improvecapacitor sizeVSAvoidcapacitance value and quality factor
Core Design Contradiction:
Volume of moving objectVSReliability

Solution Approach 1:

The patent applies local quality by using different dielectric materials with different dielectric constants in different regions of the capacitor structure. Specifically, a first dielectric material with a higher dielectric constant is used in the first region, while a second dielectric material with a lower dielectric constant is used in the second region. This allows the capacitor to achieve the required capacitance value in a smaller footprint while maintaining performance characteristics.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent employs composite materials by combining multiple dielectric materials with different properties within a single capacitor structure. The first dielectric material and second dielectric material are used in combination, each contributing different dielectric constants, to create a composite capacitor that achieves both size reduction and performance maintenance through the synergistic effect of the different materials.

Inventive Principle:
Principle #40Composite materials

2Adaptability or versatility

If varying capacitance densities are required across different frequency bands for carrier aggregation, then frequency performance improves, but device complexity increases

Engineering Contradiction:
Improvefrequency band adaptabilityVSAvoidpassive device complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent applies local quality by assigning different dielectric materials to different spatial regions of the capacitor, where each region is optimized for specific frequency band requirements. The first dielectric material with higher dielectric constant serves frequency bands requiring higher capacitance density, while the second dielectric material serves frequency bands requiring lower capacitance density, all within a single unified capacitor structure.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent achieves universality by designing a single passive device (capacitor) that can serve multiple frequency bands simultaneously through the use of multiple dielectric materials. This multi-functional capacitor structure eliminates the need for separate capacitors for different frequency bands, thereby reducing overall device complexity while maintaining frequency band adaptability.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach simplifies the fabrication process, enhances the quality of both capacitors and inductors, and effectively addresses the design complexities by tailoring capacitance densities and sizes to meet specific frequency requirements, improving the performance of RF front end modules in carrier aggregation systems.

Implementation Method 1

a first dielectric material of a first dielectric constant in a first region, and a second dielectric material of a second dielectric constant in a second region

Methodology Applied
Scientific EffectDielectric: Dielectric

Data Source

PatentEP3501244B1Multi-density MIM capacitor for improved passive on glass (POG) multiplexer performance
Publication Date: 2023.02.22 QUALCOMM INC
  • EP3501244B1 patent drawingFigure 1A
  • EP3501244B1 patent drawingFigure 1B
  • EP3501244B1 patent drawingFigure 2A~2B

AI summary

A passive device may include an inductor having interconnected trace segments. The passive device may also include parallel plate capacitors. Each of the plurality of parallel plate capacitors may have a dielectric layer between a pair of conductive plates. The parallel plate capacitors may not overlap more than one of the interconnected trace segments.