Multi-Die Pressure Sensor Package for High-Resolution Measurement
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Solution Overview
Problem
Existing sensor technologies often require external calibration and testing, and struggle to provide high resolution measurements across varying pressure ranges efficiently, especially in applications where multiple pressure measurements are needed.
Innovation Solution
A packaged pressure sensor design featuring multiple pressure sensing dies with different sensitivities and ranges, where each die is configured to provide specific resolutions over overlapping or distinct pressure ranges, allowing for higher resolution at lower pressures and lower resolution at higher pressures, and enabling the use of less expensive ADCs while reducing the need for external calibration.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a single pressure sensing die is used, then the device complexity is reduced, but the measurement precision varies across different pressure ranges
Solution Approach 1:
The pressure sensing system is divided into multiple independent pressure sensing dies, each optimized for specific pressure ranges. Each die contains its own diaphragm and piezoresistive elements, allowing them to operate independently in their optimal ranges while collectively covering a broader pressure spectrum with high precision throughout.
Solution Approach 2:
Each pressure sensing die is designed with specific local characteristics including varying diaphragm thicknesses, areas, and piezoresistive element configurations to optimize sensitivity and resolution for particular pressure ranges. This allows each die to have tailored properties that maximize measurement precision in its designated operating range.
2Measurement precision
If multiple pressure sensing dies with different sensitivities are used, then the measurement precision across varying pressure ranges is improved, but the device complexity increases
Solution Approach 1:
Multiple pressure sensing dies with different sensitivities and pressure range optimizations are combined within a single integrated sensor package. The housing structure integrates multiple cavities that accommodate each die, allowing them to function together as a unified system that provides high-resolution measurements across the entire pressure spectrum without requiring external calibration.
Solution Approach 2:
The multi-die pressure sensor package serves multiple functions simultaneously: it provides high-resolution measurements across varying pressure ranges, eliminates the need for external calibration, and offers both differential and gauge pressure sensing capabilities within a single device, replacing what would traditionally require multiple separate sensors.
3Measurement precision
If high resolution measurements are required across all pressure ranges, then the measurement precision is improved, but the cost of ADC increases
Solution Approach 1:
The sensor system dynamically selects which pressure sensing die to use based on the current pressure range being measured. Each die is activated only when its optimal pressure range is exceeded or undershot, allowing the system to maintain high measurement precision across all ranges while using less expensive ADCs that don't need to handle the full dynamic range at maximum resolution simultaneously.
Solution Approach 2:
The system changes operational parameters by switching between different pressure sensing dies with varying sensitivities and pressure ranges. This allows the ADC to operate within its optimal resolution range for each die's output, maintaining overall high measurement precision while using a lower-cost ADC that wouldn't be sufficient if a single high-resolution die covered the entire pressure spectrum.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design enables high-resolution pressure measurements across multiple ranges with reduced need for external calibration, using less expensive ADCs and providing accurate differential and gauge pressure sensing, thus enhancing operational efficiency and cost-effectiveness.
Implementation Method 1
Each of the two or more pressure sensing die includes a diaphragm and one or more piezoresistive elements positioned on the diaphragm
Data Source
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AI summary
The present disclose relates to sensor including multiple sensor elements. In some cases, the multiple sensor elements may be mounted on a single substrate (22) and each may be configured to sense a single parameter with different resolutions, sensitivities, and/or ranges, and/or the multiple parameters. In one example, multiple pressure sensing die (12, 14) may be mounted in a single package (10), and each may be configured as a differential pressure sensor, an absolute pressure sensor, and/or a gauge pressure sensor, as desired.