Multi-Electrode Conductive Probe with Insulating Trenches
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Solution Overview
Problem
The existing manufacturing process for conductive probes is complex and costly, requiring multiple masks to define the conductive layer patterns, which increases production complexity and reduces yield, and the probes are limited in applicability beyond atomic force microscopy (AFM).
Innovation Solution
A multi-electrode conductive probe design featuring a base with protrusions and insulating trenches between them, where the conductive layer covers the base, protrusions, and tips, allowing electrical insulation between adjacent electrodes without additional masks, simplifying the manufacturing process and expanding applicability beyond AFM.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If multiple masks are used to define conductive layer patterns, then measurement precision is improved, but device complexity increases and manufacturing cost increases
Solution Approach 1:
The patent merges the definition of conductive layer patterns with the existing mask layer structure. The conductive layer is formed by depositing material on the mask layer without requiring separate masking steps, thus reducing device complexity while maintaining measurement precision through the integrated design
Solution Approach 2:
The mask layer serves multiple functions: it defines the pattern of the conductive layer, provides electrical insulation between adjacent electrodes, and simplifies the manufacturing process. This multi-functionality reduces the need for additional components and steps, thereby reducing device complexity while preserving measurement capability
2Measurement precision
If multiple masks are used to define conductive layer patterns, then measurement precision is improved, but manufacturing cost increases
Solution Approach 1:
By combining the pattern definition and electrical insulation functions into a single integrated structure, the patent eliminates the need for multiple separate masking steps, thereby reducing manufacturing cost while maintaining the precision required for electric property measurements
Solution Approach 2:
The patent extracts the electrical insulation function from separate insulating layers and integrates it into the mask layer structure itself. This extraction and integration reduces the number of manufacturing steps and materials required, lowering cost while preserving the precision needed for measurement
3Reliability
If conventional conductive probe design is used, then AFM functionality is maintained, but adaptability to other applications is limited
Solution Approach 1:
The patent designs the conductive probe with multi-functional capabilities: it maintains AFM scanning functionality while adding electrical insulation between electrodes to enable electric property measurements. This universality allows the same probe structure to serve both AFM and electrical characterization applications, thereby enhancing adaptability without compromising reliability
Solution Approach 2:
The patent segments the probe into functionally independent elements: the scanning tip maintains AFM functionality while separate insulating structures enable electrical measurements. This segmentation allows each component to optimize its specific function while working together to provide both AFM and electrical measurement capabilities, enhancing overall versatility
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design simplifies the manufacturing process, reduces production costs, and enhances the probe's applicability for micro-region electric measurements, enabling broader applications beyond AFM by eliminating the need for additional masks and improving electrical insulation between electrodes.
Implementation Method 1
Portions of the conductive layer on the two adjacent support elements are electrically insulated from each other by at least an insulating trench
Data Source
AI summary
A multi-electrode conductive probe, a manufacturing method of insulating trenches and a measurement method using the multi-electrode conductive probe are disclosed. The conductive probe includes a base, a plurality of support elements, a plurality of tips and a conductive layer. The base has a surface and a plurality of protrusions. The protrusions are configured on the surface in a spacing manner, and an insulating trench is disposed between the two adjacent protrusions. The support elements are disposed at the base and protrude from the base. The tips are disposed on the end of the support elements away from the base. The conductive layer covers the surface of the base, the protrusions, the support elements and the tips. Portions of the conductive layer on the two adjacent support elements are electrically insulated from each other by at least an insulating trench.