Multi-Emitter Semiconductor Chip With Recess-Tuned Wavelength Control

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Solution Overview

Problem

Existing light-emitting semiconductor chips with multiple emitters face challenges in achieving shifted emission wavelengths while maintaining comparable operating parameters, leading to undesirable variations in laser parameters such as threshold, slope, and operation current.

Innovation Solution

A light-emitting semiconductor chip with multiple emitter units, where each emitter unit has a recess with varying widths to achieve wavelength-dependent reflectivity, allowing for emission wavelength shifts without altering the operating parameters, achieved through a semiconductor body with epitaxially grown layers and strategically designed coatings.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If the laser geometry is varied to achieve wavelength shifts, then emission wavelengths are shifted, but laser parameters such as threshold, slope, and operation current change

Engineering Contradiction:
Improveemission wavelengthVSAvoidlaser parameter consistency
Core Design Contradiction:
Adaptability or versatilityVSReliability

Solution Approach 1:

The patent applies local quality by introducing strain-changing structures at specific locations within the semiconductor body. These structures are positioned in the waveguide region to locally modify the refractive index and achieve wavelength shifts without affecting the overall laser parameters. The localized nature of these structures ensures that only the emission wavelength changes while threshold, slope, and operation current remain comparable across different emitter units.

Inventive Principle:
Principle #3Local quality

2Adaptability or versatility

If multiple-epitaxy is used to produce emitters with different wavelengths, then emission wavelengths are shifted, but technical effort and cost increase

Engineering Contradiction:
Improveemission wavelengthVSAvoidmanufacturing complexity
Core Design Contradiction:
Adaptability or versatilityVSEase of manufacture

Solution Approach 1:

The patent segments the wavelength tuning function from the epitaxy process. Instead of using multiple-epitaxy to achieve different wavelengths, the invention uses a single epitaxy process to create identical emitter units, then applies separate strain-changing structures to each emitter's waveguide region. This segmentation allows wavelength differentiation without requiring complex multi-epitaxy procedures, thereby reducing manufacturing complexity and cost.

Inventive Principle:
Principle #1Segmentation

3Adaptability or versatility

If strain-changing structures are added to the wafer, then locally different wavelengths are formed, but additional space is required and far-field width is affected

Engineering Contradiction:
Improveemission wavelengthVSAvoidchip space
Core Design Contradiction:
Adaptability or versatilityVSArea of stationary object

Solution Approach 1:

The patent transitions the wavelength control mechanism from the lateral dimension to the vertical dimension. Instead of placing strain-changing structures that extend laterally across the chip surface, the invention introduces these structures within the vertical stack of the semiconductor body, specifically in the waveguide region beneath the active region. This vertical integration allows wavelength differentiation without consuming additional lateral chip space and maintains far-field width characteristics.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution enables efficient variation of emission wavelengths across emitter units while maintaining consistent operating parameters, improving image quality in applications like AR/VR and allowing for low-cost, high-yield manufacturing.

Implementation Method 1

The active region of each of the at least one emitter unit is arranged in a resonator. The resonator is configured in particular to amplify the light generated in the active region.

Methodology Applied
Scientific EffectOptical resonance: Resonance

Implementation Method 2

each emitter unit has a recess with varying widths to achieve wavelength-dependent reflectivity, allowing for emission wavelength shifts without altering the operating parameters

Methodology Applied
Scientific EffectWavelength-dependent reflectivity: Reflection

Data Source

PatentUS20240030686A1Light-Emitting Semiconductor Chip and Method for Manufacturing Light-Emitting Semiconductor Chip
Publication Date: 2024.01.25 AMS OSRAM INT GMBH
  • US20240030686A1 patent drawing
  • US20240030686A1 patent drawing
  • US20240030686A1 patent drawing

AI summary

In an embodiment a light-emitting semiconductor chip includes a semiconductor body having a plurality of emitter units, wherein each emitter unit has an active region which is arranged in a resonator having an outcoupling side and a rear side and which is configured to emit light at the outcoupling side along a radiation emission direction, wherein, in each emitter unit, the active region is completely penetrated by at least one recess in the semiconductor body, wherein, in each emitter unit, in a region of the active region the recess has a recess width measured along the radiation emission direction, and wherein recess widths of the emitter units are at least partially different.