Multi-Frequency Gas Sensing for Drift-Resistant MOS Detection

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Solution Overview

Problem

Conventional metal oxide semiconductor (MOS) gas sensors face accuracy degradation due to chemical interferences and ambient condition fluctuations, leading to sensor response drift and non-linear resistance measurements, necessitating extensive calibration and increased costs.

Innovation Solution

A sensor system with a multi-energy-delivering element applies alternating current at varying operational frequencies and temperatures to excite the sensing material, enabling multi-gas differentiation and reducing baseline drift through dielectric AC excitation, thereby improving linearity and simplifying calibration.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If conventional resistance measurement is used for MOS sensors, then the sensor response follows a well-known power law, but saturation of sensor response occurs at high concentrations and accuracy degrades

Engineering Contradiction:
Improvesensor response accuracyVSAvoidsensor response saturation
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

The patent changes the measurement parameter from DC resistance to AC impedance at multiple frequencies. By measuring impedance rather than resistance, and using multiple frequency points, the system avoids the saturation effects that limit conventional resistance-based MOS sensors at high gas concentrations, thereby improving both measurement precision and reliability across a broader concentration range.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent transitions from one-dimensional DC resistance measurement to multi-dimensional AC impedance measurement across multiple frequencies. This dimensional expansion allows the system to extract more information from the sensing material, enabling accurate gas concentration measurement without saturation by utilizing frequency-dependent impedance characteristics.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Adaptability or versatility

If MOS sensors are used in field conditions, then broad applications are achieved, but sensor accuracy degrades due to chemical interferences and ambient condition variations

Engineering Contradiction:
Improvebroad applicationsVSAvoidsensor accuracy
Core Design Contradiction:
Adaptability or versatilityVSMeasurement precision

Solution Approach 1:

The patent implements dynamic measurement by taking impedance readings at multiple frequencies and using temperature cycling. This dynamic approach allows the system to adapt to varying ambient conditions and chemical interferences in field environments, maintaining measurement precision across diverse applications by capturing the frequency-dependent response characteristics of the sensing material under different conditions.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The patent employs periodic temperature cycling of the sensing element to maintain stable baseline readings and improve accuracy. By periodically varying the temperature and measuring impedance responses at multiple frequencies during these cycles, the system compensates for drift caused by ambient condition variations and chemical interferences, thereby maintaining high measurement precision in field conditions.

Inventive Principle:
Principle #19Periodic action

3Ease of operation

If conventional DC resistance measurement is used, then simple measurement is achieved, but non-linear response and drift occur necessitating extensive calibration

Engineering Contradiction:
Improvemeasurement simplicityVSAvoidcalibration time
Core Design Contradiction:
Ease of operationVSLoss of time

Solution Approach 1:

The patent performs preliminary temperature cycling and multi-frequency impedance measurements during an initial calibration phase. By pre-characterizing the frequency-dependent impedance response at different temperatures, the system creates a comprehensive calibration dataset that simplifies subsequent gas concentration measurements. This preliminary action reduces the need for frequent recalibration while maintaining measurement accuracy.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent uses feedback from multi-frequency impedance measurements to continuously monitor and correct for baseline drift. By comparing impedance responses across multiple frequencies and using temperature-cycling reference measurements, the system automatically compensates for drift in real-time, reducing the need for extensive manual calibration and maintaining measurement accuracy without increasing operational complexity.

Inventive Principle:
Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The system enhances sensor accuracy and reduces calibration time and cost by achieving linear gas sensor responses and stable baseline correction, allowing for efficient differentiation and quantification of multiple gases.

Implementation Method 1

A sensor system with a multi-energy-delivering element applies alternating current at varying operational frequencies and temperatures to excite the sensing material, enabling multi-gas differentiation and reducing baseline drift through dielectric AC excitation

Methodology Applied
Scientific EffectDielectric AC excitation: Dielectric Heating

Implementation Method 2

The sensor system includes a heating element configured to heat the sensing material to different temperatures

Methodology Applied
Scientific EffectJoule heating: Joule Heating

Data Source

PatentUS12540909B2Sensing system and method
Publication Date: 2026.02.03 GE INFRASTRUCTURE TECH LLC
  • US12540909B2 patent drawing
  • US12540909B2 patent drawing
  • US12540909B2 patent drawing

AI summary

A detector system may include a sensing element including a substrate, sensing electrodes supported by the substrate, sensing material over the sensing electrodes, and a multi-energy-delivering element. The multi-energy-delivering element may be coupled to the sensing material and may deliver different types of energy to the gas sensing material. The detector system may include excitation and detection circuitry coupled to the sensing electrodes and the multi-energy-delivering element, and a controller coupled to the excitation and detection circuitry. The controller may cause the excitation and detection circuitry to achieve multi-gas differentiation with one-, two-, or higher-dimensional detection by applying an alternating current through the sensing electrodes at one or more operational frequencies for excitation of the sensing material, and applying at least one type of operational energy to the gas sensing material via the multi-energy-delivering element, wherein at least one type of operational energy has at least two levels.