Multi-Grid Shuttle Handling for Precise Electron Microscope Loading
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Solution Overview
Problem
Current automated grid handling systems for electron microscopes are complex, costly, and do not utilize the internal facilities and systems of the microscope, requiring external pneumatics, electrical, and vacuum sources, making them inefficient for handling multiple grids.
Innovation Solution
An automatic grid handling system that connects to the electron microscope's multi-axis positioning stage, using a transport module with an end effector to handle and position grids within the TEM column, leveraging the microscope's internal systems for high-resolution, high-speed, and high-stability grid positioning and handling of up to 25 grids in a batch.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Extent of automation
If a standalone automated grid handling system is used, then automation capability is improved, but device complexity and cost increase due to requiring external pneumatics, electrical, and vacuum sources
Solution Approach 1:
The patent merges the automated grid handling system with the existing electron microscope system by integrating it with the multi-axis positioning stage. The handling system shares the microscope's internal vacuum environment, mechanical positioning infrastructure, and control systems, eliminating the need for separate external pneumatics, electrical, and vacuum sources while maintaining full automation capability
Solution Approach 2:
The multi-axis positioning stage serves dual functions: it acts as both the positioning system for grid inspection and as the transport mechanism for automated grid handling. This multi-functionality allows the system to leverage existing infrastructure for multiple purposes, reducing overall system complexity and cost
2Extent of automation
If a standalone automated grid handling system is used, then automation capability is improved, but cost increases due to requiring external facilities
Solution Approach 1:
The patent merges the automated grid handling system with the existing electron microscope system by integrating it with the multi-axis positioning stage. The handling system shares the microscope's internal vacuum environment, mechanical positioning infrastructure, and control systems, eliminating the need for separate external pneumatics, electrical, and vacuum sources while maintaining full automation capability
Solution Approach 2:
The system uses the electron microscope's own internal facilities (vacuum system, positioning stage, control systems) to serve the automated grid handling function. This self-service approach eliminates the need for separate external support systems, significantly reducing overall system cost while maintaining automation
3Measurement precision
If grids are handled one at a time, then positioning precision is maintained, but productivity decreases due to tedious manual operations
Solution Approach 1:
The system pre-positions multiple grids in a magazine or holder outside the vacuum chamber. The automated handling mechanism retrieves grids from this pre-positioned state and transports them one at a time to the inspection position, maintaining precision while eliminating repetitive manual positioning operations. The preliminary preparation of multiple grids enables continuous automated processing
Solution Approach 2:
The system dynamically switches between automated high-speed transport of grids and precise positioning during inspection. The multi-axis positioning stage provides high-speed movement for grid transport, then transitions to high-precision positioning mode during inspection, optimizing both productivity and measurement precision at different stages of the process
Data Source
AI summary
An automated grid handling apparatus for an electron microscope including a transport module having a multistage shuttle, the multistage shuttle having a first shuttle stage having a single degree of freedom of motion for gross movement, a second shuttle stage having a single degree of freedom of motion independent of the first stage for fine movement, an end effector connected to at least one of the first and second shuttle stages, the end effector being configured to hold a grid carrier and transport the grid carrier holding the grid into and out of an electron microscope through a transport interface that is communicably connected to a multi-axis positioning stage port of the electron microscope, the end effector having a range of motion, defined by a combination of the first and second stage degrees of freedom of motions and the multi-axis positioning stage internal to the electron microscope, and an automated loading module connected to the frame and being communicably connected to the transport module, the automated loading module including a load port module through which grids are loaded into the automated loading and transport modules.


