Multi-Hand Transfer Robot for Simultaneous Substrate Collection
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The existing substrate-processing apparatuses face inefficiencies in loading and unloading substrates due to the need for repeated transfers between process chambers and the buffer unit, leading to increased transfer time and reduced productivity.
Innovation Solution
The apparatus incorporates a transfer member with multiple horizontally movable pick-up hands that can collect and transfer processed substrates from multiple process chambers to the buffer unit simultaneously, reducing the number of transfer operations and improving efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a single substrate cleaning apparatus is used to reduce apparatus size and achieve uniform cleaning performance, then the apparatus size is reduced and cleaning uniformity is improved, but the transfer time increases and productivity decreases due to repeated transfer operations
Solution Approach 1:
The transfer robot is divided into multiple hands (first hand and second hand) that can operate independently and simultaneously. Each hand is responsible for specific transfer tasks, allowing parallel operations to reduce total transfer time and improve productivity.
Solution Approach 2:
Multiple substrate transfer operations are merged into a single coordinated cycle by having multiple hands work simultaneously. The first hand transfers substrates from buffer unit to process chambers while the second hand transfers substrates from process chambers to buffer unit in parallel, reducing the number of sequential transfer cycles needed.
2Ease of operation
If the main transfer robot uses two hands for different purposes, then substrate transfer between process chambers and buffer unit is enabled, but the number of transfer operations increases and productivity is reduced
Solution Approach 1:
The transfer robot dynamically assigns different hands to different tasks based on real-time needs. The control unit coordinates the hands to perform loading and unloading operations in an optimized sequence, allowing the system to adapt and minimize total transfer operations while maintaining operational flexibility.
Solution Approach 2:
The multiple hands enable continuous transfer operations without idle time. While one hand is transferring substrates, the other hand simultaneously performs transfer operations, ensuring that the system continuously performs useful work rather than waiting for sequential operations to complete.
Data Source
AI summary
A substrate-processing apparatus includes a plurality of process chambers, a buffer unit, and a transfer member. The transfer member transfers the substrate between the process chambers and the buffer unit, and collects the substrates processed in at least two of the process chambers where processes are simultaneously finished to transfer the processed substrates to the buffer unit at once. Accordingly, a number of times during which the transfer member transfers substrates is decreased so that the substrate-processing apparatus reduces the process time and improves the productivity.